Correlation between in situ optical emission spectroscopy in a reactive Ar/O2 rf magnetron sputtering discharge and Pb(ZrxTi1-x)O3 thin film composition

Applied Physics Letters

Volumn 73, Issue 8, 1998, Pages 1023-1025

  Ayguavives, F ^a   Ea Kim, B ^a   Aubert, P ^a   Agius, B ^a   Bretagne, J ^b  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000641796     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122072     Document Type: Article

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