Analysis of DC magnetron discharges in Ar-N2 gas mixtures. Comparison of a collisional-radiative model with optical emission spectroscopy

Plasma Sources Science and Technology

Volumn 7, Issue 2, 1998, Pages 219-229

  Debal, F ^a   Bretagne, J ^a,b   Jumet, M ^a   Wautelet, M ^a   Dauchot, J P ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ARGON; COMPOSITION; ELECTRIC CURRENTS; EMISSION SPECTROSCOPY; LIGHT EMISSION; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MIXTURES; NITROGEN; OPTICAL VARIABLES MEASUREMENT; PLASMAS;

COLLISIONAL RADIATIVE MODEL; DC MAGNETRON DISCHARGE; EMISSION INTENSITY; GAS MIXTURE; OPTICAL EMISSION SPECTROSCOPY;

PLASMA SOURCES;

EID: 0032072918     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/2/016     Document Type: Review

References (25)

1. Grill A 1994 Cold Plasma in Materials Fabrication (New York: IEEE)
2. Roth J C 1995 Industrial Plasma Engineering, vol 1 (Bristol: Institute of Physics)
3. Wautelet M, Dauchot J P, Debal F, Edart S and Hecq M 1996 J. Mater. Res. 11 825
4. Dauchot J P, Edart S, Wautelet M and Hecq M 1995 Vacuum 46 927
5. Bretagne J, Delouya G, Godart J and Puech V 1981 J. Phys. D: Appl. Phys. 14 1225
6. Bretagne J, Godart G and Puech V 1982 J. Phys. D: Appl. Phys. 15 2205
7. Bretagne J, Delouya G, Corse C, Capitelli M and Bacal M 1985 J. Phys. D: Appl. Phys. 18 811
8. Guimarães F and Bretagne J 1993 Plasma Sources Sci. Technol. 2 127
9. Trennepohl W Jr, Bretagne J, Gousset G, Pagnon D and Touzeau M 1996 Plasma Sources Sci. Technol. 5 607
10. Dony M F, Ricard A, Dauchot J P, Hecq M and Wautelet M 1995 Surf. Coat. Technol. 74/75 479
11. Guimarães F, Almeida J B and Bretagne J 1991 J. Vac. Sci. Technol. A 9 133
12. Itikawa Y et al 1986 J. Phys. Chem. Ref. Data. 15 985
13. Taylor R D, Slinker S P and Ali A W 1988 J. Appl. Phys. 64 982
14. Phelps A V and Pitchford L C 1985 JILA Information Center Report 26
15. Chutjian A, Cartwright D C and Trajmar S 1977 Phys. Rev. A 16 1052
16. Cosby PC 1993 J. Chem. Phys. 98 9544
17. Drawin H W 1967 Report Commissariat à l'Energie Atomique EUR-CEA-FC 383
18. Lofthus A and Krupenie PH 1977 J. Phys. Chem. Ref. Data 16 113
19. Henry R J W, Burke P G and Sinfailam A-L 1969 Phys. Rev. 178 218
20. Wiese W L, Smith M W and Glennon B M 1966 Atomic Transition Probabilities (National Standards Reference Data Series) vol 1 (Washington, DC: National Bureau of Standards)
21. Kossyi A, Kostinsky A Yu, Matveyev A A and Dilakov V P 1992 Plasma Sources Sci. Technol. 1 207
22. Gordiets B F, Ferreira C M, Guerra V L, Loureiro J M A H, Nahorny J, Pagnon D, Touzeau M and Vialle M 1995 IEEE Trans. Plasma Sci. 23 750
23. Garscadden A and Nagpal R 1995 Plasma Sources Sci. Technol. 4 268
24. Ricard A 1995 Plasmas Réactifs (Société Française du Vide)
25. Lin C-L and Kaufman F 1971 J. Chem. Phys. 55 3760