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Journal of Micromechanics and Microengineering

Volumn 11, Issue 2, 2001, Pages 153-159

On the out-of-plane deformation of V-shaped micromachined beams

(3) Tsou, C a Yin, H a Fang, W a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; DEFLECTION (STRUCTURES); DEFORMATION; ELECTRON MICROSCOPES; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; RESIDUAL STRESSES; SILICA; SUSPENSIONS (COMPONENTS);

V-SHAPED MICROMACHINED BEAMS;

MICROMACHINING;

EID: 0035281355 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/2/311 Document Type: Article

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.