Experimental validation of compact damping models of perforated MEMS devices

Microsystem Technologies

Volumn 15, Issue 8, 2009, Pages 1121-1128

  Veijola, Timo ^a   De Pasquale, Giorgio ^b   Somà, Aurelio ^b  

^a AALTO UNIVERSITY   (Finland)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT MODEL; DAMPING COEFFICIENTS; DAMPING MODEL; EXPERIMENTAL VALIDATIONS; MEMSDEVICES; MICROMECHANICAL TESTS; PERFORATED PLATE; SURFACE SHAPE;

POWDERS;

DAMPING;

EID: 67649188203     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0793-6     Document Type: Conference Paper

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