Energy study of buckled micromachined beams for thin-film stress measurements applied to SiO2

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 1999, Pages 414-421

  Nicu, Liviu ^a   Temple Boyer, Pierre ^a   Bergaud, Christian ^a   Scheid, Emmanuel ^a   Martinez, Augustin ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BUCKLING; COMPRESSIVE STRESS; MICROMACHINING; POTENTIAL ENERGY; RESIDUAL STRESSES; SILICA; STRESS ANALYSIS; THIN FILMS;

DEFLECTION AMPLITUDE MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0033341836     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/319     Document Type: Article

References (23)

1. Zook J D, Burns D W, Guckel H, Sniegovski J J, Engelstad R L and Feng Z 1992 Characteristics of poly silicon resonant beams Sensors Actuators A 35 51-9
2. Stoney G G 1909 The tension of metallic films deposited by electrolysis Proc. R. Soc. A 82 172-5
3. Hoffman R W 1966 The mechanical properties of thin condensed films Physics of Thin Films ed G Hass and R E Thun (New York: Academic)
4. Chopra K L 1969 Mechanical effects in thin films Thin Film Phenomena (New York: McGraw-Hill)
5. Mehregany M, Howe R T and S. D. Senturia 1987 Novel microstructures for the in situ measurement of mechanical properties of thin films J. Appl. Phys. 62 3579-84
6. Fang W and Wickert J A 1994 Post buckling of micromachined beams J. Micromech. Microeng. 4 116-22
7. Fang W and Wickert J A 1995 Comments on measuring thin-film stresses using bi-layer micromachined beams J. Micromech. Microeng. 5 276-81
8. Zhang T Y, Zhang X and Zohar Y 1998 Buckling of polysilicon microbeams during sacrificial layer removal J. Micromech. Microeng. 8 243-9
9. 2 films on Si substrate J. Appl. Phys. 43 119-25
10. Guckel H, Randazzo T and Burns D W 1985 A simple technique for the determination of mechanical strain in thin films with application to polysilicon J. Appl. Phys. 57 1671-5
11. Chiskis A and Parnes R 1999 On nanobuckling of monomolecular layers adhering to a substrate J. Appl. Mech. 66 51-4
12. Dickinson S M 1980 The lateral vibration of slightly bent slender beams subject to prescribed axial end displacement J. Sound Vibr. 68 507-14
13. Kim C S and Dickinson SM 1986 The flexural vibration of slightly curved slender beams subject to axial end displacement J. Sound Vibr. 104 170-5
14. Bouwstra A and Legtenberg R 1993 Response of resonating microbridge mass flow sensor Sensors Materials 5 1-26
15. Geijselaers H J and Tijdeman H 1991 The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor Sensors Actuators A 29 37-41
16. Timoshenko S P and Gere J M 1963 Elastic buckling of bars and frames Theory of Elastic Stability (New York: McGraw-Hill)
17. Timoshenko S P and Young D H 1972 Vibration of elastic bodies Vibration Problems in Engineering (Princeton, NJ: Van Nostrand Reinhold)
18. Krulevitch P and Johnson G C 1998 Curvature of a cantilever beam subjected to an equi-biaxial bending moment Mater. Res. Soc. Symp. Proc. 518 67-72
19. 1998 MATLAB Software version 5.2.0, The Math Works, Inc.
20. Petersen K E 1978 Dynamic micromechanics on silicon : techniques and devices IEEE Trans. Electron Devices 25 1241-50
21. Kim T M 1996 Influence of substrates on the elastic reaction of films for the microindentation tests Thin Solid Films 283 12-16
22. 2 film stress measurements on thermally oxidized Si J. Vac. Sci. Technol. B 5 15-19
23. 2/Si structures formed by thermal oxidation of amorphous and crystalline silicon Semicond. Sci. Technol. 11 1225-30