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Volumn 10, Issue 6-7, 2004, Pages 467-471

Selection of mold materials for electroforming of monolithic two-layer microstructure

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; MICROSTRUCTURE; MOLDS; PHOTORESISTS; SURFACE ROUGHNESS; VISCOSITY;

EID: 10044223567     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0372-9     Document Type: Conference Paper
Times cited : (10)

References (10)
  • 2
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    • A micromachined single-chip inkjet printhead
    • Krause P; Obermeier E; Wehl W (1996) A micromachined single-chip inkjet printhead. Sensors Actuators A 53: 405-409
    • (1996) Sensors Actuators A , vol.53 , pp. 405-409
    • Krause, P.1    Obermeier, E.2    Wehl, W.3
  • 3
    • 0031235275 scopus 로고    scopus 로고
    • A high-resolution silicon monolithic nozzle array for inkjet printing
    • Chen J; Wise KD (1997) A high-resolution silicon monolithic nozzle array for inkjet printing. IEEE Transactions Electron Devices 44(9): 1401-1409
    • (1997) IEEE Transactions Electron Devices , vol.44 , Issue.9 , pp. 1401-1409
    • Chen, J.1    Wise, K.D.2
  • 5
    • 0347649424 scopus 로고    scopus 로고
    • Buried microchannels in photopolymer for delivering of solutions to neurons in a network
    • Heuschkel MO; Guerin L; Bussson B; Bertrand D; Renaud P (1998) Buried microchannels in photopolymer for delivering of solutions to neurons in a network. Sensors Actuators B, 48: 356-361
    • (1998) Sensors Actuators B , vol.48 , pp. 356-361
    • Heuschkel, M.O.1    Guerin, L.2    Bussson, B.3    Bertrand, D.4    Renaud, P.5
  • 6
    • 0035124001 scopus 로고    scopus 로고
    • A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
    • Tay FEH; Kan JAV; Watt F; Choong WO (2001) A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels. J Micromech Microeng 11: 27-32
    • (2001) J Micromech Microeng , vol.11 , pp. 27-32
    • Feh, T.1    Jav, K.2    Watt, F.3    Choong, W.O.4
  • 7
    • 0036196925 scopus 로고    scopus 로고
    • A novel fabrication method of embedded micro channels employing simple UV dosage control and antireflection coating
    • Tseng FG; Chuang YJ; Lin WK (2002) A novel fabrication method of embedded micro channels employing simple UV dosage control and antireflection coating. MEMS'02: 69-72
    • (2002) MEMS'02 , pp. 69-72
    • Tseng, F.G.1    Chuang, Y.J.2    Lin, W.K.3
  • 10
    • 0036544396 scopus 로고    scopus 로고
    • High aspect ratio ultrathick microstencil by JSR THB430-N negative photoresist
    • Tseng FG; Yu CS (2001) High aspect ratio ultrathick microstencil by JSR THB430-N negative photoresist. Sensors Actuators A 97: 764-770
    • (2001) Sensors Actuators A , vol.97 , pp. 764-770
    • Tseng, F.G.1    Yu, C.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.