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Volumn 10, Issue 6-7, 2004, Pages 467-471
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Selection of mold materials for electroforming of monolithic two-layer microstructure
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC FIELDS;
MICROSTRUCTURE;
MOLDS;
PHOTORESISTS;
SURFACE ROUGHNESS;
VISCOSITY;
DIMENSION CONTROL;
MICRO TOTAL ANALYSIS;
MOLD MATERIALS;
PATTERNING PROCESS;
ELECTROFORMING;
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EID: 10044223567
PISSN: 09467076
EISSN: None
Source Type: Journal
DOI: 10.1007/s00542-004-0372-9 Document Type: Conference Paper |
Times cited : (10)
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References (10)
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