Direct evidence of "spring softening" nonlinearity in micromachined mechanical resonator using optical beam deflection technique

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 3, 2006, Pages 732-736

  Zhao, J H ^a   Bridges, G E ^a   Thomson, D J ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; LIGHT INTERFERENCE; MECHANICAL PROPERTIES; MICROMACHINING; NATURAL FREQUENCIES; NONLINEAR OPTICS; OSCILLATORS (ELECTRONIC);

DC BIAS VOLTAGE; ELECTROSTATIC EXCITATION; HARMONIC OSCILLATOR; MECHANICAL RESONATORS;

OPTICAL RESONATORS;

EID: 33646556451     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2194934     Document Type: Article

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