Analytical vs. computational approach of the pull-in voltage of electrostatically actuated micro-bridges

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2005, Pages 179-182

  Tibeica, C ^a   Voicu, R ^a   Bazu, M ^a   Ilian, V E ^a   Vasilache, D ^a   Galateanu, L ^a   Pons, P ^b   Yacine, K ^b   Flourens, F ^b  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b LAAS CNRS   (France)

Author keywords

Electrostatic actuation; FEM simulation; Micro bridge; Pull in voltage; Residual stress

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; RESIDUAL STRESSES; VOLTAGE MEASUREMENT;

BRIDGE STRUCTURES; MICRO-BRIDGES; PULL IN VOLTAGE;

ELECTROSTATIC ACTUATORS;

EID: 33751549567     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2005.1558741     Document Type: Conference Paper

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