Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect

Analog Integrated Circuits and Signal Processing

Volumn 57, Issue 3, 2008, Pages 213-224

  Somà, Aurelio ^a   De Pasquale, Giorgio ^a  

^a POLITECNICO DI TORINO   (Italy)

Author keywords

Damping; Dynamic; Finite element; MEMS; Optical interferometry; Resonator

Indexed keywords

DAMPING; DYNAMICS; INTERFEROMETRY; MEMS; PLATES (STRUCTURAL COMPONENTS); RESONATORS;

DYNAMIC BEHAVIOURS; EXPERIMENTAL COMPARISON; MESH DENSITY; NUMERICAL APPROACHES; OPTICAL INTERFEROMETRIC MICROSCOPES; OPTICAL INTERFEROMETRY; OSCILLATING STRUCTURES; SQUEEZE-FILM DAMPING;

FINITE ELEMENT METHOD;

EID: 67649142644     PISSN: 09251030     EISSN: 15731979     Source Type: Journal    
DOI: 10.1007/s10470-008-9165-x     Document Type: Article

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