Experimental-numerical comparison of the cantilever MEMS frequency shift in presence of a residual stress gradient

Sensors

Volumn 8, Issue 2, 2008, Pages 767-783

  Ballestra, Alberto ^a   Somà, Aurelio ^a   Pavanello, Renato ^b  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Frequency shift; MEMS; Micro cantilever; Residual stress gradient

Indexed keywords

FREQUENCY SHIFT KEYING; MEMS; NANOCANTILEVERS;

DYNAMIC CHARACTERIZATION; ELECTROSTATIC EXCITATION; EXPERIMENTAL FREQUENCIES; FREQUENCY SHIFT; MICRO-CANTILEVERS; OPTICAL INTERFEROMETRY; RESIDUAL STRESS EFFECTS; RESIDUAL STRESS GRADIENTS;

RESIDUAL STRESSES;

EID: 40849103007     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s8020767     Document Type: Article

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