A measurement of Young's modulus and residual stress in MEMS bridges using a surface profiler

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 686-692

  Denhoff, M W ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL EQUATIONS; ELASTIC MODULI; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; SILICON NITRIDE; THIN FILMS;

ANALYTICAL BEAM THEORY; FIXED FIXED BEAM; MICROELECTROMECHANICAL BRIDGES; SURFACE PROFILER;

MICROELECTROMECHANICAL DEVICES;

EID: 0141718806     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/321     Document Type: Article

References (9)

1. Bustillo J M, Howe R T and Muller R S 1998 Surface micromachining for microelectromechanical systems Proc. IEEE 86 1552-74
2. Tai Y-C and Muller R S 1990 Measurement of Young's modulus on microfabricated structures using a surface profiler Proc. IEEE Micro Electro Mechanical Systems Workshop (Napa Valley, CA) pp 147-52
3. Qin M and Poon V M C 2000 Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler J. Mater. Sci. Lett. 19 2243-5
4. Zhang T-Y, Su Y-J, Qian C-F, Zhan M-H and Chen L-Q 2000 Microbridge testing of silicon nitride thin films deposited on silicon wafers Acta Mater. 48 2843-57
5. Jensen B D, Bitsie F and de Boer M 1999 Interferometric measurement for improved understanding of boundary effects in micromachined beams Proc. SPIE Conf. on Materials and Device Characterization in Micromachining II (Santa Clara, CA) SPIE 3875 61-72
6. Landau L D and Lifshitz E M 1986 Theory of Elasticity 3rd edn (Oxford: Pergamon)
7. Denhoff M W, Grant P D, Harry M A and Yu M 2000 Fabrication of a microwave MEMS switch Proc. ANTEM 2000 (Winnipeg, 30 July-2 August 2000) pp 79-82
8. Grant P D, Mansour R R and Denhoff M W 2002 A comparison between RF MEMS switches and semiconductor switches Can. J. Elect. Comput. Eng. 27 pp 33-9
9. Stoffel A, Kovács A, Kronast W and Müller B 1996 LPCVD against PECVD for micromechanical applications J. Micromech. Microeng. 6 1-13