RF-MEMS beam components: FEM modelling and experimental identification of pull-in in presence of residual stress

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2008, Pages 232-235

  Ballestra, Alberto ^a   Brusa, Eugenio ^b   De Pasquale, Giorgio ^a   Munteanu, Mircea Gh ^b   Somà, Aurelio ^a  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF UDINE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING TESTS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; MEMS; MICROELECTROMECHANICAL DEVICES; RESIDUAL STRESSES; STRENGTH OF MATERIALS;

ACCURATE PREDICTIONS; BEAM COMPONENTS; EXPERIMENTAL IDENTIFICATIONS; EXPERIMENTAL VALIDATIONS; FEM MODELLING; GEOMETRICAL NON LINEARITIES; IN PLANES; INITIAL CURVATURES; MECHANICAL COUPLINGS; MICRO-BEAMS; MICRO-CANTILEVERS; MICROBRIDGES; NUMERICAL APPROACHES; NUMERICAL MODELS; OUT OF PLANES; OUT-OF-PLANE BENDING; PRE LOADINGS; PULL-IN; PULL-IN VOLTAGES; RESIDUAL STRAINS; REVERSE ANALYSIS; RF-MEMS;

TESTING;

EID: 62249110184     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2008.4752990     Document Type: Conference Paper

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