3D heterostructures and systems for novel MEMS/NEMS

Science and Technology of Advanced Materials

Volumn 10, Issue 3, 2009, Pages

  Yakovlevich Prinz, Victor ^a   Alexandrovich Seleznev, Vladimir ^a   Victorovich Prinz, Alexander ^a   Vladimirovich Kopylov, Alexander ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

MEMS NEMS heterostructures; Micro electro mechanical systems (MEMS); Nano electro mechanical systems (NEMS)

Indexed keywords

BUILDING BLOCKES; GAS AND LIQUID FLOWS; HETEROSTRUCTURES; HIGH-POWER; MEMS/NEMS; MEMS/NEMS HETEROSTRUCTURES; MICRO AND NANOSTRUCTURES; MICRO-ELECTRO-MECHANICAL; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); NANO ELECTROMECHANICAL SYSTEMS; NANO-ELECTRO-MECHANICAL SYSTEMS (NEMS); NANOACTUATORS; NOVEL DEVICES; QUANTUM PROPERTIES;

COMPOSITE MICROMECHANICS; CRYSTALS; ELECTROSTATIC DEVICES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; THREE DIMENSIONAL;

MECHANICS;

EID: 70350231761     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1088/1468-6996/10/3/034502     Document Type: Review

References (74)

1. Cleland A 2003 Foundations of Nanomechanics (Berlin: Springer)
2. Bhushan B 2004 Springer Handbook of Nanotechnology (Berlin: Springer)
3. Goddard W A III, Brenner D W, Lyshevski S E and Iafrate G J 2002 Handbook of Nanoscience, Engineering, and Technology (Boca Raton, FL: CRC Press)
4. Li M, Tang H X and Roukes M L 2007 Nat. Nanotechnol. 2 114
5. Becker E W, Ehrfeld W, Hagmann P, Maner A and Munchmeuer B 1986 Microelectron. Eng. 4 35
6. Furuya K 2008 Sci. Technol. Adv. Mater. 9 014110
7. Prinz V Ya, Seleznev V A, Gutakovsky A K, Chehovskiy A V, Preobrazenskii V V, Putyato M A and Gavrilova T A 2000 Physica E 6 828
8. Prinz V Ya 2003 Microelectron. Eng. 69 466
9. Prinz V Ya 2006 Phys. Status Solidi b 243 3333
10. Wilson S et al 2007 Mater. Sci. Eng. R 56 1
11. Liu C 2007 Adv. Mater. 19 3783
12. Prinz A V and Prinz V Ya 2008 Proc. 16th Int. Symp. on Nanostructures: Physics and Technology pp 147-8
13. Prinz A V and Prinz V Ya 2006 Russian Patent No. 2278815
14. Cho A 2006 Science 313 164
15. Scott S A and Lagally M G 2007 J. Phys. D: Appl. Phys. 40 R75
16. Li X 2008 J. Phys. D: Appl. Phys. 41 193001
17. Prinz V Ya, Grutzmacher D, Beyer A, David C, Ketterer B and Deccard E 2001 Nanotechnology 12 399
18. Prinz A V and Vorob'ev A B 2002 Semicond. Sci. Technol. 17 614
19. Golod S V, Prinz V Ya and Mashanov V I 2005 Thin Solid Films 489 169
20. Prinz V Ya, Vorob'ev A B and Seleznev V A 2001 Inst. Phys. Conf. Ser. 170 319
21. Seleznev V A, Yamaguchi H, Hirayama Y and Prinz V Ya 2003 Japan. J. Appl. Phys. 42 L79
22. Prinz V Ya, Chekhovskiy A V, Preobrazhenskii V V, Semyagin B R and Gutakovsky A K 2002 Nanotechnology 13 231
23. Zhang L, Abbott J J, Dong L, Kratochvil B E, Bell D and Nelson B J 2009 Appl. Phys. Lett. 94 064107
24. Grutzmacher D, Zhang L, Dong L, Bell D, Nelson B, Prinz A V and Ruhd E 2008 Microelectron. J. 39 478
25. Prinz V Ya and Golod S V 2006 J. Appl. Mech. Tech. Phys. 47 867
26. Nastaushev Yu V, Prinz V Ya and Svitasheva S N 2005 Nanotechnology 16 908
27. Luchnikov V, Sydorenko O and Stamm M 2005 Adv. Mater. 17 1177
28. Mei Y, Huang G, Solovev A, Bermudes E, Monch I, Ding A, Reindl T, Fu R, Chu P and Schmidt O G 2008 Adv. Mater. 20 4085
29. Bell D J, Dong L, Nelson B J, Golling M, Zhang L and Grützmacher D 2006 Nano Lett. 6 725
30. Nemirovsky Y and Degani O 2001 J. Micromech. Syst. 10 601
31. Degani O, Socher E, Lipson A, Leitner T, Setter D J, Kaldor S and Nemirovsky Y 1998 J. Micromech. Syst. 7 373
32. Bermejo S et al 2008 J. Micromech. Microeng. 18 055004
33. Seeger J I and Boser B E 2003 J. Microelectromech. Syst. 12 656
34. Li Y, Packirisamy M and Bhat R 2008 Microsyst. Technol. 14 255-66
35. Guo J G and Zhao Y P 2006 Int. J. Solids Struct. 43 675
36. Rollier A S et al 2006 J. Micromech. Microeng. 16 794
37. Prinz V Ya, Prinz A V and Kopylov A V 2008 Patent Appl. No. 208122800 favorable decision 14.04.2009
38. Kopylov A V, Prinz A V and Prinz V Ya to be published
39. Antonova I V, Soots R A, Guliaev M B, Prinz V Ya, Kagan M S and Kolodzey J 2007 Appl. Phys. Lett. 91 102116
40. Ikeda K 2007 Sci. Technol. Trends-Q. Rev. 22 98
41. Yoshino T, Suzuki Y and Kasagi N 2008 J. Fluid Sci. Technol. 3 137
42. Ho C-H and Tai Y-C 1998 Annu. Rev. Fluid Mech. 30 579
43. Hinze J O 1959 Turbulence: An Introduction to its Mechanism and Theory (New York: McGraw-Hill) p 680
44. Fomin V M, Shiplyuk A N, Aniskin V M, Maslov A A, Pai V V, Prinz V Ya and Seleznev V A 2006 Dokl. Phys. 51 132
45. Seleznev V A, Prinz V Ya, Aniskin V M and Maslov A A 2009 J. Appl. Mech. Tech. Phys. 50 291 (Engl. Transl.)
46. Seleznev V A, Prinz V Ya, Aniskin V M and Maslov A A 2009 Prikl. Mekh. Tekh. Fiz. 50 145
47. Shiplyuk A N, Aniskin M V, Seleznev A V, Prinz V Ya, Maslov A A and Matvienko A A 2009 J. Appl. Mech. Tech. Phys. 50 454
48. Eggers J and Villermaux E 2008 Rep. Prog. Phys. 71 036601
49. Anderson W F, Killos L, Sanders-Haigh L, Kretschmer P J and Diacumakos E G 1980 Proc. Natl. Acad. Sci. USA. 77 5399
50. Prinz A V and Prinz V Ya 2003 Surf. Sci. 532-535 911
51. Prinz V Ya, Golod S V and Prinz A V 2008 Patent of Russia No. 2341299
52. Schrlau M et al 2008 Nanotechnology 19 015101
53. McAllister D V, Allen M G and Prausnitz M R 2000 Annu. Rev. Biomed. Eng. 2 289
54. Reed M L and Lye W K 2004 Proc. IEEE 92 56
55. Lin L W and Pisano A P 1999 J. Microelectromech. Syst. 8 78
56. Han S W et al 2005 Biosens. Bioelectron. 20 2120
57. Han S W et al 2008 Nanomed.: Nanotechnol. Biol. Med. 4 215
58. Obataya I et al 2005 Nano Biotechnol. 1 347
59. Vakarelski I U, Brown S C, Higashitani K and Moudgil B M 2007 Langmuir 23 10893
60. Chen X, Kis A, Zettl A and Bertozzi C R 2007 Proc. Natl. Acad. Sci. USA 104 8218
61. Prinz A V, Prinz V Ya and Seleznev V A 2003 Microelectron. Eng. 67-68 782
62. Lapine M and Tretyakov S A 2007 IET Microw. Antennas Propag. 1 3
63. Pendry J B and Smith D R 2006 Sci. Am. 295 60
64. Naumova E V et al 2009 J. Opt. A: Pure Appl. Opt. to be published in a special issue
65. Naumova E V and Prinz V Ya 2008 Russian Patent No. 2317942
66. Prinz V Ya and Seleznev V A 2007 Phys. Status Solidi b 244 4193
67. Shekhter R I, Galperin Yu, Gorelik Y L, Isacsson A and Jonson M 2003 J. Phys.: Condens. Matter 15 R441
68. Vorob'ev B, Friedland K-J, Kostial H, Hey R, Jahn U, Wiebicke E, Yukecheva Ju S and Prinz V Ya 2007 Phys. Rev. B 75 205309
69. Kibis O V and Portnoi M E 2007 Tech. Phys. Lett. 33 878
70. Magarill L I and ntin M V 2003 JETP Lett. 78 213
71. Prinz A V and Prinz V Ya 2006 Russian Patent No. 2278815
72. Osadchii V M and Prinz V Ya 2005 Phys. Rev. B 72 033313
73. Tsui Y C and Clyne T W 1997 Thin Solid Films 306 23
74. Timoshenko S and Woinowsky-Krieger S 1959 Theory of Plates and Shells (New York: McGraw-Hill)