Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors

Journal of Applied Mechanics and Technical Physics

Volumn 50, Issue 2, 2009, Pages 291-296

  Seleznev, V A ^a   Prinz, V Ya ^a   Aniskin, V M ^b   Maslov, A A ^b  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^b KHRISTIANOVICH INSTITUTE OF THEORETICAL AND APPLIED MECHANICS   (Russian Federation)

Author keywords

Arrays of microtubes; Flow control; Tubular sensors and actuators

Indexed keywords

ARRAYS OF MICROTUBES; ELECTRICAL CONTACTS; GAS FLOWS; MICRO-HEATERS; NANO METER RANGES; PLANAR TECHNOLOGIES; TECHNOLOGICAL PROCESS; TUBULAR SENSORS AND ACTUATORS; WALL THICKNESS;

ACTUATORS; FLOW CONTROL; MICROSENSORS; SILICON COMPOUNDS;

NANOSENSORS;

EID: 63649148409     PISSN: 00218944     EISSN: 15738620     Source Type: Journal    
DOI: 10.1007/s10808-009-0039-5     Document Type: Article

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