Shape optimizations and static/dynamic characterizations of deformable microplate structures with multiple electrostatic actuators

Microsystem Technologies

Volumn 14, Issue 2, 2008, Pages 255-266

  Li, Yunqiang ^a   Packirisamy, Muthukumaran ^a   Bhat, Rama B ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; DEFLECTION (STRUCTURES); ELECTROSTATIC ACTUATORS; OPTOELECTRONIC DEVICES; REAL TIME SYSTEMS; SHAPE OPTIMIZATION;

LEAST SQUARES METHOD; MICROFABRICATION PROCESS; MICROMIRRORS; MICROPLATES;

MICROSYSTEMS;

EID: 35148849547     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0420-3     Document Type: Article

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