Semiconductor micro- and nanoneedles for microinjections and ink-jet printing

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 782-788

  Prinz, A V ^a   Prinz, V Ya ^a   Seleznev, V A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Microfluid; Microinjection; Microneedle; Nanotube; Semiconductor thin film

Indexed keywords

HETEROJUNCTIONS; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; NANOTUBES; SEMICONDUCTING GALLIUM ARSENIDE; THIN FILMS;

MICRONEEDLES;

SEMICONDUCTOR DEVICES;

EID: 0038020063     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00139-4     Document Type: Conference Paper

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