Directional-rolling method for strained SiGe/Si films and its application to fabrication of hollow needles

Thin Solid Films

Volumn 489, Issue 1-2, 2005, Pages 169-176

  Golod, S V ^a   Prinz, V Ya ^a   Mashanov, V I ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Anisotropy; Etching; Heterostructures; Nanostructures

Indexed keywords

ANISOTROPY; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; INFRARED TRANSMISSION; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR MATERIALS; SPECTRUM ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

HETEROSTRUCTURE; MICROTUBES-NEEDLES; NANOELECTROMECHANICS; SILICON-GERMANIUM;

THIN FILMS;

EID: 23144467660     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.05.013     Document Type: Article

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