Charge control of parallel-plate, electrostatic actuators and the tip-in instability

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 656-671

  Seeger, Joseph I ^a   Boser, Bernhard E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Capacitance; Charge transfer; Dynamics; Electrostatic actuators; Extended travel; Pull in; Rotation

Indexed keywords

CAPACITANCE; ELECTRIC CHARGE; ELECTROSTATIC ACTUATORS; INTEGRATED CIRCUITS; MICROACTUATORS; SPURIOUS SIGNAL NOISE; VOLTAGE CONTROL;

CHARGE CONTROL; PARALLEL PLATE ACTUATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0242636508     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.818455     Document Type: Article

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