The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 794-801

  Rollier, A S ^a   Legrand, B ^a   Collard, D ^b   Buchaillot, L ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; INSULATING MATERIALS; SHORT CIRCUIT CURRENTS; SILICON COMPOUNDS; SOLUTIONS;

BINARY-STATE OPERATION; FABRICATED DEVICES; PULL-IN VOLTAGE;

ELECTROSTATIC ACTUATORS;

EID: 33645093951     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/016     Document Type: Article

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