Directional rolling of strained heterofilms

Semiconductor Science and Technology

Volumn 17, Issue 6, 2002, Pages 614-616

  Vorob'ev, A B ^a   Prinz, V Ya ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HETEROJUNCTIONS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MOLECULAR BEAM EPITAXY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR GROWTH; STRESSES; SUBSTRATES;

CYLINDRICAL GEOMETRY; DIRECTIONAL ROLLING; FREE STANDING SHELLS; PLANAR MESASTRUCTURE; SACRIFICIAL LAYER; STRAINED HETEROFILMS;

SEMICONDUCTING FILMS;

EID: 0036611138     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/17/6/319     Document Type: Article

References (7)