Optocoupler driving of MEMS electrostatic switches

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Bermejo, S ^a   Molinero, D ^a   Ortega, P ^a   Castaer L ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; MEMS;

ELECTROSTATIC SWITCHES; OPTOCOUPLER DRIVING;

SWITCHING SYSTEMS;

EID: 42549157521     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/055004     Document Type: Article

References (21)

1. Rebeiz G M 2003 RF MEMS Theory, Design, and Technology (Hoboken: Wiley) pp 4-5
2. http://www.analog.com/UploadedFiles/Product_Highlights/ 388070707ChargePumpApp.Bulletin_REV.pdf
3. Pylarinos L and Phang K 2003 Analysis of output ripple in multi-phase clocked charge pumps Circuits and Systems (Bangkok) pp 285-8
4. Upadhyaya P and Hess H L 2007 Minimizing the output voltage ripple of a DC/DC power converter by phase locking IEEE Workshop on Microelectronics and Electron Devices (Boise) pp 31-4
5. Nathanson H C, Nevel W E, Wickstrom R A and Davis J R Jr 1967 The resonant gate transistor IEEE Trans. Electron Devices 14 117-33
6. Castãer L and Senturia S D 1999 Speed-energy optimization of electrostatic actuators based on pull IEEE J. Microelectromech. Syst. 8 290-8
7. Castãer L, Rodriguez A, Pons J and Senturia S D 1999 Measurement of power-speed product of electrostatic actuators Transducers 99 (Sendai) pp 1772-5
8. Castãer L, Pons J, Nadal-Guardia R and Rodríguez A 2001 Analysis of the extended operation range of electrostatic actuators by current-pulse drive Sensors Actuators A 90 181-90
9. http://www.semicon.toshiba.co.jp/openb2bib/websearch/productDetails.jsp? partKey=TLP590B
10. Bermejo S and Castãer L 2005 Dynamics of MEMS electrostatic driving using a photovoltaic source Sensors Actuators A 121 237-242
11. Jacobs E W, Sun C K, Nguyen R, Fogliatti D, Nguyen H, Hunt R, Albares D J and Chang C T 2001 Optically controlled pin-diode RF switching for tactical signal intelligence technology Technical Report 1853 (San Diego) pp 1-23
12. Jacobs E W, Simonds H B, Roberts M W, Jones T O III, Brock D W and Dempsey C E 2004 TST reconfigurable aperture RF MEMS for antenna applications Technical Report 1910 (San Diego) pp 1-33
13. Ortega P, Bermejo S and Castãer L 2001 Multichip module photovoltaic miniarrays IEEE Trans. Compon., Packag. Manuf. Technol. Soc. 24 169-73
14. Bermejo S, Ortega P, Jimenez J J and Castãer L 2005 Response of c-Si PV arrays under monochromatic light for MEMS power supply J. Micromech. Microeng. 15 1446-53
15. Markvart T and Castãer L 2003 Practical Handbook of Photovoltaics Fundamentals and Applications (Oxford: Elsevier) pp 71-81
16. Orcard Inc. 1998 PSpice online manual
17. Sze S M 1981 Physics of Semiconductor Devices (New York: Wiley) pp 63-133
18. http://www.memsrus.com/nc-pmumps.refs.html
19. Chan E, Garikipati K and Dutton R 1999 Characterization of contact electromechanics through capacitance-voltage measurements and simulations J. Microelectromech. Syst. 8 208-17
20. Steeneken P G, Rijks Th G S M, van Beek J T M, Ulenaers M J E, De Coster J and Puers R 2005 Dynamics and squeeze film gas damping of a capacitive RF MEMS switch J. Micromech. Microeng. 15 176-84
21. Nadal-Guardia R, Dehe A, Aigner R and Castaner L 2002 Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point J. Microelectromech. Syst. 11 255-63