TEM sample preparation by FIB for carbon nanotube interconnects

Ultramicroscopy

Volumn 109, Issue 11, 2009, Pages 1353-1359

  Ke, Xiaoxing ^a   Bals, Sara ^a   Romo Negreira, Ainhoa ^b,c   Hantschel, Thomas ^b   Bender, Hugo ^b   Van Tendeloo, Gustaaf ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Carbon nanotubes; Focused ion beam; Patterned nanostructures; Sample preparation; Transmission electron microscopy

Indexed keywords

CARBON NANOTUBE INTERCONNECTS; CLEANING PROCEDURES; CONTACT HOLES; HIGH QUALITY; INNER SHELL; PATTERNED NANOSTRUCTURES; PATTERNED SUBSTRATES; PROTECTION LAYERS; SAMPLE PREPARATION; TEM; TEM SAMPLE PREPARATION;

BEAM PLASMA INTERACTIONS; ELECTRON MICROSCOPES; FOCUSED ION BEAMS; ION BOMBARDMENT; IONS; LIGHT TRANSMISSION; NANOSTRUCTURES; PLATINUM; SPECIMEN PREPARATION; TRANSMISSION ELECTRON MICROSCOPY;

CARBON NANOTUBES;

CARBON NANOTUBE; NANOSHELL;

ARTICLE; CHEMICAL STRUCTURE; DENSITY; ELECTRIC POTENTIAL; SAMPLING; SURFACE PROPERTY; SYNTHESIS; TECHNIQUE; TRANSMISSION ELECTRON MICROSCOPY;

EID: 69749087303     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2009.06.011     Document Type: Article

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