Novel approach to fabricating carbon nanotube via interconnects using size-controlled catalyst nanoparticles

2006 International Interconnect Technology Conference, IITC

Volumn , Issue , 2006, Pages 230-232

  Sato, Shintaro ^a   Nihei, Mizuhisa ^a   Mimura, Atsushi ^a   Kawabata, Akio ^a   Kondo, Daiyu ^a   Shioya, Hiroki ^a   Iwai, Taisuke ^a   Mishima, Mino ^b   Ohniti, Mari ^a   Awano, Yuji ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

^b JAPAN FINE CERAMICS CENTER   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; NANOCOMPOSITES; NANOPARTICLES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; TECHNOLOGY;

CARBON NANOTUBE; CATALYST FILMS; CATALYST NANOPARTICLES; CATALYST PARTICLES; DEPOSITION SYSTEMS; IMPACTOR; INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE; NEW APPROACHES; VIA HOLES; VIA RESISTANCE;

CARBON NANOTUBES;

EID: 36349032609     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2006.1648696     Document Type: Conference Paper

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