Electron-beam assisted platinum deposition as a protective layer for FIB and TEM applications

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 469-471

  Kwong, W Y ^a   Zhang, W Y ^a  

^a Syst on Silicon Mfg Co Pte Ltd   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION BEAMS; PLATINUM; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB); PROTECTION LAYERS; PT DEPOSITION;

ELECTRON BEAMS;

EID: 28744447447     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/issm.2005.1513408     Document Type: Conference Paper

References (9)

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