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Volumn 42, Issue 6 B, 2003, Pages
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Direct diameter-controlled growth of multiwall carbon nanotubes on nickel-suicide layer
a a a |
Author keywords
Carbon nanotube; Interconnection; Nickel catalyst; Nickel silicide; Plasma enhanced CVD
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Indexed keywords
CATALYSIS;
CATALYSTS;
ELECTRODES;
MOSFET DEVICES;
NICKEL;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING FILMS;
INTERCONNECTIONS;
CARBON NANOTUBES;
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EID: 0042866046
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.l721 Document Type: Article |
Times cited : (75)
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References (12)
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