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Volumn 14, Issue 4, 2009, Pages 397-404

Guest editorial: Introduction to the focused section on mechatronics for MEMS and NEMS

Author keywords

Force; Grippers; Mathematical model; Mechatronics; Microactuators; Sensors

Indexed keywords


EID: 69549137968     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2026008     Document Type: Editorial
Times cited : (5)

References (46)
  • 1
    • 0033334483 scopus 로고    scopus 로고
    • Tailoring unconventional actuators using compliant transmissions: Design methods and applications
    • Dec
    • S. Kota, J. Hetrick, Z. Li, and L. Saggere, "Tailoring unconventional actuators using compliant transmissions: Design methods and applications," IEEE/ASME Trans. Mechatronics, vol. 4, no. 4, pp. 396-408, Dec. 1999.
    • (1999) IEEE/ASME Trans. Mechatronics , vol.4 , Issue.4 , pp. 396-408
    • Kota, S.1    Hetrick, J.2    Li, Z.3    Saggere, L.4
  • 3
    • 0031233892 scopus 로고    scopus 로고
    • A 1.5-V-supplied CMOS ASIC for the actuation of an electrostatic micromotor
    • Sep
    • P. Favrat, L. Paratte, H. Ballan, M. J. Declercq, and N. F. deRooij, "A 1.5-V-supplied CMOS ASIC for the actuation of an electrostatic micromotor," IEEE/ASME Trans. Mechatronics, vol. 2, no. 3, pp. 153-160, Sep. 1997.
    • (1997) IEEE/ASME Trans. Mechatronics , vol.2 , Issue.3 , pp. 153-160
    • Favrat, P.1    Paratte, L.2    Ballan, H.3    Declercq, M.J.4    deRooij, N.F.5
  • 4
    • 0034206698 scopus 로고    scopus 로고
    • Motion control of protozoa for bioMEMS
    • Jun
    • A. Itoh, "Motion control of protozoa for bioMEMS," IEEE/ASME Trans. Mechatronics, vol. 5, no. 2, pp. 181-188, Jun. 2000.
    • (2000) IEEE/ASME Trans. Mechatronics , vol.5 , Issue.2 , pp. 181-188
    • Itoh, A.1
  • 5
    • 69549096466 scopus 로고    scopus 로고
    • Focused section on micromechatronics - Guest editorial
    • Mar
    • P. Dario and T. Fukuda, "Focused section on micromechatronics - Guest editorial," IEEE/ASME Trans. Mechatronics, vol. 3, no. 1, pp. 1-2, Mar. 1998.
    • (1998) IEEE/ASME Trans. Mechatronics , vol.3 , Issue.1 , pp. 1-2
    • Dario, P.1    Fukuda, T.2
  • 6
    • 0032021744 scopus 로고    scopus 로고
    • Applications of micromechatronics in minimally invasive surgery
    • Mar
    • F. Tendick, S. S. Sastry, R. S. Fearing, and M. Cohn, "Applications of micromechatronics in minimally invasive surgery," IEEE/ASME Trans. Mechatronics, vol. 3, no. 1, pp. 34-42, Mar. 1998.
    • (1998) IEEE/ASME Trans. Mechatronics , vol.3 , Issue.1 , pp. 34-42
    • Tendick, F.1    Sastry, S.S.2    Fearing, R.S.3    Cohn, M.4
  • 10
    • 0032167295 scopus 로고    scopus 로고
    • Microfabricated electrostatic actuators for hard disk drives
    • Sep
    • D. A. Horsley, R. Horowitz, and A. P. Pisano, "Microfabricated electrostatic actuators for hard disk drives," IEEE/ASME Trans. Mechatronics, vol. 3, no. 3, pp. 175-183, Sep. 1998.
    • (1998) IEEE/ASME Trans. Mechatronics , vol.3 , Issue.3 , pp. 175-183
    • Horsley, D.A.1    Horowitz, R.2    Pisano, A.P.3
  • 13
    • 0031357768 scopus 로고    scopus 로고
    • Fiberless flexible microactuator designed by finite-element method
    • Dec
    • K. Suzumori, T. Maeda, H. Watanabe, and T. Hisada, "Fiberless flexible microactuator designed by finite-element method," IEEE/ASME Trans. Mechatronics, vol. 2, no. 4, pp. 281-286, Dec. 1997.
    • (1997) IEEE/ASME Trans. Mechatronics , vol.2 , Issue.4 , pp. 281-286
    • Suzumori, K.1    Maeda, T.2    Watanabe, H.3    Hisada, T.4
  • 14
    • 43249121660 scopus 로고    scopus 로고
    • Development and experimental analysis of a soft compliant tactile microsensor for anthropomorphic artificial hand
    • Apr
    • L. Beccai, S. Roccella, L. Ascari, P. Valdastri, A. Sieber, M. C. Carrozza, M. Chiara, and P. Dario, "Development and experimental analysis of a soft compliant tactile microsensor for anthropomorphic artificial hand," IEEE/ASME Trans. Mechatronics, vol. 13, no. 2, pp. 158-168, Apr. 2008.
    • (2008) IEEE/ASME Trans. Mechatronics , vol.13 , Issue.2 , pp. 158-168
    • Beccai, L.1    Roccella, S.2    Ascari, L.3    Valdastri, P.4    Sieber, A.5    Carrozza, M.C.6    Chiara, M.7    Dario, P.8
  • 15
    • 34347379301 scopus 로고    scopus 로고
    • A dynamic 3-D surface profilometer with nanoscale measurement resolution and MHz bandwidth for MEMS characterization
    • Jun
    • L. C. Chen, H. Y. Huang, and K. C. Fan, "A dynamic 3-D surface profilometer with nanoscale measurement resolution and MHz bandwidth for MEMS characterization," IEEE/ASME Trans. Mechatronics, vol. 12, no. 3, pp. 299-307, Jun. 2007.
    • (2007) IEEE/ASME Trans. Mechatronics , vol.12 , Issue.3 , pp. 299-307
    • Chen, L.C.1    Huang, H.Y.2    Fan, K.C.3
  • 16
    • 34247354479 scopus 로고    scopus 로고
    • Rapid manufacturing of intelligent mold with embedded microsensors
    • Apr
    • R. C. Luo and Y. L. Pan, "Rapid manufacturing of intelligent mold with embedded microsensors," IEEE/ASME Trans. Mechatronics, vol. 12, no. 2, pp. 190-197, Apr. 2007.
    • (2007) IEEE/ASME Trans. Mechatronics , vol.12 , Issue.2 , pp. 190-197
    • Luo, R.C.1    Pan, Y.L.2
  • 17
    • 33947401487 scopus 로고    scopus 로고
    • Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling
    • Feb
    • P. Basset, A. Kaiser, B. Legrand, D. Collard, and L. Buchaillot, "Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling," IEEE/ASME Trans. Mechatronics, vol. 12, no. 1, pp. 23-31, Feb. 2007.
    • (2007) IEEE/ASME Trans. Mechatronics , vol.12 , Issue.1 , pp. 23-31
    • Basset, P.1    Kaiser, A.2    Legrand, B.3    Collard, D.4    Buchaillot, L.5
  • 18
    • 33750400209 scopus 로고    scopus 로고
    • A comparative study of MEMS microactuators for use in a dual-stage servo with an instrumented suspension
    • Oct
    • X. H. Huang, R. Horowitz, and Y. F. Li, "A comparative study of MEMS microactuators for use in a dual-stage servo with an instrumented suspension," IEEE/ASME Trans. Mechatronics, vol. 11, no. 5, pp. 524-532, Oct. 2006.
    • (2006) IEEE/ASME Trans. Mechatronics , vol.11 , Issue.5 , pp. 524-532
    • Huang, X.H.1    Horowitz, R.2    Li, Y.F.3
  • 20
    • 18844453678 scopus 로고    scopus 로고
    • On low-frequency electric power generation with PZT ceramics
    • Apr
    • S. R. Platt, S. Farritor, and H. Haider, "On low-frequency electric power generation with PZT ceramics," IEEE/ASME Trans. Mechatronics vol. 10, no. 2, pp. 240-252, Apr. 2005.
    • (2005) IEEE/ASME Trans. Mechatronics , vol.10 , Issue.2 , pp. 240-252
    • Platt, S.R.1    Farritor, S.2    Haider, H.3
  • 22
    • 0037350785 scopus 로고    scopus 로고
    • Pinpoint injection of microtools for minimally invasive micromanipulation of microbe by laser trap
    • Mar
    • F. Arai, H. Maruyama, T. Sakami, A. Ichikawa, and T. Fukuda, "Pinpoint injection of microtools for minimally invasive micromanipulation of microbe by laser trap," IEEE/ASME Trans. Mechatronics, vol. 8, no. 1, pp. 3-9, Mar. 2003.
    • (2003) IEEE/ASME Trans. Mechatronics , vol.8 , Issue.1 , pp. 3-9
    • Arai, F.1    Maruyama, H.2    Sakami, T.3    Ichikawa, A.4    Fukuda, T.5
  • 23
    • 0035364941 scopus 로고    scopus 로고
    • Mechatronics of electrostatic microactuators for computer disk drive dual-stage servo systems
    • Jun
    • Y. F. Li and R. Horowitz, "Mechatronics of electrostatic microactuators for computer disk drive dual-stage servo systems," IEEE/ASME Trans. Mechatronics, vol. 6, no. 2, pp. 111-121, Jun. 2001.
    • (2001) IEEE/ASME Trans. Mechatronics , vol.6 , Issue.2 , pp. 111-121
    • Li, Y.F.1    Horowitz, R.2
  • 24
    • 0037350796 scopus 로고    scopus 로고
    • Piezoelectrically actuated four-bar mechanism with two flexible links for micromechanical flying insect thorax
    • Mar
    • M. Sitti, "Piezoelectrically actuated four-bar mechanism with two flexible links for micromechanical flying insect thorax," IEEE/ASME Trans. Mechatronics, vol. 8, no. 1, pp. 26-36, Mar. 2003.
    • (2003) IEEE/ASME Trans. Mechatronics , vol.8 , Issue.1 , pp. 26-36
    • Sitti, M.1
  • 25
    • 0013033915 scopus 로고    scopus 로고
    • Teleoperated touch feedback from the surfaces at the nanoscale: Modeling and experiments
    • Jun
    • M. Sitti and H. Hashimoto, "Teleoperated touch feedback from the surfaces at the nanoscale: Modeling and experiments," IEEE/ASME Trans. Mechatronics, vol. 8, no. 2, pp. 287-298, Jun. 2003.
    • (2003) IEEE/ASME Trans. Mechatronics , vol.8 , Issue.2 , pp. 287-298
    • Sitti, M.1    Hashimoto, H.2
  • 26
    • 33750396146 scopus 로고    scopus 로고
    • On development of a rotary-linear actuator using piezoelectric translators
    • Oct
    • Y. Zhang, G. Liu, and J. Hesselbach, "On development of a rotary-linear actuator using piezoelectric translators," IEEE/ASME Trans. Mechatronics, vol. 11, no. 5, pp. 647-650, Oct. 2006.
    • (2006) IEEE/ASME Trans. Mechatronics , vol.11 , Issue.5 , pp. 647-650
    • Zhang, Y.1    Liu, G.2    Hesselbach, J.3
  • 27
    • 23044509614 scopus 로고    scopus 로고
    • A magnetically driven linear microactuator with new driving method
    • Jun
    • M. Komori and T. Hirakawa, "A magnetically driven linear microactuator with new driving method," IEEE/ASME Trans. Mechatronics, vol. 10, no. 3, pp. 335-338, Jun. 2005.
    • (2005) IEEE/ASME Trans. Mechatronics , vol.10 , Issue.3 , pp. 335-338
    • Komori, M.1    Hirakawa, T.2
  • 28
    • 3342902777 scopus 로고    scopus 로고
    • Electrokinetics in micro devices for biotechnology applications
    • Jun
    • P. K. Wong, T. H. Wang, J. H. Deval, and C. M. Ho, "Electrokinetics in micro devices for biotechnology applications," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 366-376, Jun. 2004.
    • (2004) IEEE/ASME Trans. Mechatronics , vol.9 , Issue.2 , pp. 366-376
    • Wong, P.K.1    Wang, T.H.2    Deval, J.H.3    Ho, C.M.4
  • 29
    • 54349087388 scopus 로고    scopus 로고
    • A control-oriented and physics-based model for ionic polymer-metal composite actuators
    • Oct
    • Z. Chen and X. B. Tan, "A control-oriented and physics-based model for ionic polymer-metal composite actuators," IEEE/ASME Trans. Mechatronics, vol. 13, no. 5, pp. 519-529, Oct. 2008.
    • (2008) IEEE/ASME Trans. Mechatronics , vol.13 , Issue.5 , pp. 519-529
    • Chen, Z.1    Tan, X.B.2
  • 30
    • 33947414457 scopus 로고    scopus 로고
    • Performance quantification of conducting polymer actuators for real applications: A microgripping system
    • Feb
    • G. Alici and N. N. Huynh, "Performance quantification of conducting polymer actuators for real applications: A microgripping system," IEEE/ASME Trans. Mechatronics, vol. 12, no. 1, pp. 73-84, Feb. 2007.
    • (2007) IEEE/ASME Trans. Mechatronics , vol.12 , Issue.1 , pp. 73-84
    • Alici, G.1    Huynh, N.N.2
  • 31
    • 33947128082 scopus 로고    scopus 로고
    • Closed-loop optimal control-enabled piezoelectric microforce sensors
    • Aug
    • Y. T. Shen, E. Winder, N. Xi, C. A. Pomeroy, and U. C. Wejinya, "Closed-loop optimal control-enabled piezoelectric microforce sensors," IEEE/ASME Trans.Mechatronics, vol. 11, no. 4, pp. 420-427, Aug. 2006.
    • (2006) IEEE/ASME Trans.Mechatronics , vol.11 , Issue.4 , pp. 420-427
    • Shen, Y.T.1    Winder, E.2    Xi, N.3    Pomeroy, C.A.4    Wejinya, U.C.5
  • 32
    • 28044450618 scopus 로고    scopus 로고
    • Identification and control of a sensorized microgripper for micromanipulation
    • Oct
    • J. Park, S. Kim, D. H. Kim, B. Kim, S. J. Kwon, J. O. Park, andK. I. Lee, "Identification and control of a sensorized microgripper for micromanipulation," IEEE/ASME Trans. Mechatronics, vol. 10, no. 5, pp. 601-606, Oct. 2005.
    • (2005) IEEE/ASME Trans. Mechatronics , vol.10 , Issue.5 , pp. 601-606
    • Park, J.1    Kim, S.2    Kim, D.H.3    Kim, B.4    Kwon, S.J.5    Park, J.O.6    andK7    Lee, I.8
  • 33
    • 18844439911 scopus 로고    scopus 로고
    • Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation
    • Apr
    • R. Perez, J. Agnus, C. Clevy, A. Hubert, and N. Chaillet, "Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation," IEEE/ASME Trans. Mechatronics, vol. 10, no. 2, pp. 161-171, Apr. 2005.
    • (2005) IEEE/ASME Trans. Mechatronics , vol.10 , Issue.2 , pp. 161-171
    • Perez, R.1    Agnus, J.2    Clevy, C.3    Hubert, A.4    Chaillet, N.5
  • 34
    • 4744350191 scopus 로고    scopus 로고
    • Smart microrobot on chip: Design, identification, and control
    • Sep
    • A. Ferreira, J. Agnus, N. Chaillet, and J. M. Breguet, "Smart microrobot on chip: Design, identification, and control," IEEE/ASME Trans. Mechatronics, vol. 9, no. 3, pp. 508-519, Sep. 2004.
    • (2004) IEEE/ASME Trans. Mechatronics , vol.9 , Issue.3 , pp. 508-519
    • Ferreira, A.1    Agnus, J.2    Chaillet, N.3    Breguet, J.M.4
  • 35
    • 3342910584 scopus 로고    scopus 로고
    • Automatic microassembly system assisted by vision servoing and virtual reality
    • Jun
    • A. Ferreira, C. Cassier, and S. Hirai, "Automatic microassembly system assisted by vision servoing and virtual reality," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 321-333, Jun. 2004.
    • (2004) IEEE/ASME Trans. Mechatronics , vol.9 , Issue.2 , pp. 321-333
    • Ferreira, A.1    Cassier, C.2    Hirai, S.3
  • 36
    • 0037352372 scopus 로고    scopus 로고
    • Force sensing microinstrument for measuring tissue properties and pulse in microsurgery
    • Mar
    • A. Menciassi, A. Eisinberg, M. C. Carrozza, and P. Dario, "Force sensing microinstrument for measuring tissue properties and pulse in microsurgery," IEEE/ASME Trans. Mechatronics, vol. 8, no. 1, pp. 10-17, Mar. 2003.
    • (2003) IEEE/ASME Trans. Mechatronics , vol.8 , Issue.1 , pp. 10-17
    • Menciassi, A.1    Eisinberg, A.2    Carrozza, M.C.3    Dario, P.4
  • 37
    • 0036493518 scopus 로고    scopus 로고
    • Design and control of a microrobotic system using magnetic levitation
    • Mar
    • M. B. Khamesee, N. Kato, Y. Nomura, and T. Nakamura, "Design and control of a microrobotic system using magnetic levitation," IEEE/ASME Trans. Mechatronics, vol. 7, no. 1, pp. 1-14, Mar. 2002.
    • (2002) IEEE/ASME Trans. Mechatronics , vol.7 , Issue.1 , pp. 1-14
    • Khamesee, M.B.1    Kato, N.2    Nomura, Y.3    Nakamura, T.4
  • 38
    • 0035737822 scopus 로고    scopus 로고
    • Development of micromanipulator and haptic interface for networked micromanipulation
    • Dec
    • N. Ando, P. Korondi, and H. Hashimoto, "Development of micromanipulator and haptic interface for networked micromanipulation," IEEE/ASME Trans. Mechatronics, vol. 6, no. 4, pp. 417-427, Dec. 2001.
    • (2001) IEEE/ASME Trans. Mechatronics , vol.6 , Issue.4 , pp. 417-427
    • Ando, N.1    Korondi, P.2    Hashimoto, H.3
  • 39
    • 43249128092 scopus 로고    scopus 로고
    • Response characterisation of electroactive polymers as mechanical sensors
    • Apr
    • G. Alici, G. M. Spinks, J. M. D. Madden, Y. Wu, and G. G. Wallace, "Response characterisation of electroactive polymers as mechanical sensors," IEEE/ASME Trans. Mechatronics, vol. 13, no. 2, pp. 187-196, Apr. 2008.
    • (2008) IEEE/ASME Trans. Mechatronics , vol.13 , Issue.2 , pp. 187-196
    • Alici, G.1    Spinks, G.M.2    Madden, J.M.D.3    Wu, Y.4    Wallace, G.G.5
  • 40
    • 61549122603 scopus 로고    scopus 로고
    • Mechanical and control-oriented design of a monolithic piezoelectric microgripper using a new topological optimization method
    • Feb
    • M. Grossard, M. C. Rotinat-Libersa, N. Chaillet, and M. Boukallel, "Mechanical and control-oriented design of a monolithic piezoelectric microgripper using a new topological optimization method," IEEE/ASME Trans. Mechatronics, vol. 14, no. 1, pp. 32-45, Feb. 2009.
    • (2009) IEEE/ASME Trans. Mechatronics , vol.14 , Issue.1 , pp. 32-45
    • Grossard, M.1    Rotinat-Libersa, M.C.2    Chaillet, N.3    Boukallel, M.4
  • 41
    • 41249095894 scopus 로고    scopus 로고
    • Sensor referenced real-time videolization of atomic force microscopy for nanomanipulations
    • Feb
    • L. Q. Liu, Y. L. Luo, N. Xi, Y. C. Wang, J. B. Zhang, and G. Y. Li, "Sensor referenced real-time videolization of atomic force microscopy for nanomanipulations," IEEE/ASME Trans. Mechatronics, vol. 13, no. 1, pp. 76-85, Feb. 2008.
    • (2008) IEEE/ASME Trans. Mechatronics , vol.13 , Issue.1 , pp. 76-85
    • Liu, L.Q.1    Luo, Y.L.2    Xi, N.3    Wang, Y.C.4    Zhang, J.B.5    Li, G.Y.6
  • 42
    • 33750399253 scopus 로고    scopus 로고
    • Nanoscale path planning and motion control with maglev positioners
    • Oct
    • H. Shakir and W. J. Kim, "Nanoscale path planning and motion control with maglev positioners," IEEE/ASME Trans. Mechatronics, vol. 11, no. 5, pp. 625-633, Oct. 2006.
    • (2006) IEEE/ASME Trans. Mechatronics , vol.11 , Issue.5 , pp. 625-633
    • Shakir, H.1    Kim, W.J.2
  • 43
    • 3342996931 scopus 로고    scopus 로고
    • Atomic force microscope probe based controlled pushing for nanotribological characterization
    • Jun
    • M. Sitti, "Atomic force microscope probe based controlled pushing for nanotribological characterization," IEEE/ASME Trans. Mechatronics vol. 9, no. 2, pp. 343-349, Jun. 2004.
    • (2004) IEEE/ASME Trans. Mechatronics , vol.9 , Issue.2 , pp. 343-349
    • Sitti, M.1
  • 44
    • 3343017572 scopus 로고    scopus 로고
    • Development of augmented reality system for AFM-based nanomanipulation
    • Jun
    • G. Y. Li, N. Xi, M. M. Yu, and W. K. Fung, "Development of augmented reality system for AFM-based nanomanipulation," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 358-365, Jun. 2004.
    • (2004) IEEE/ASME Trans. Mechatronics , vol.9 , Issue.2 , pp. 358-365
    • Li, G.Y.1    Xi, N.2    Yu, M.M.3    Fung, W.K.4
  • 45
    • 3342921784 scopus 로고    scopus 로고
    • Six-axis nanopositioning device with precision magnetic levitation technology
    • Jun
    • S. Verma, W. J. Kim, and J. Gu, "Six-axis nanopositioning device with precision magnetic levitation technology," IEEE/ASME Trans. Mechatronics, vol. 9, no. 2, pp. 384-391, Jun. 2004.
    • (2004) IEEE/ASME Trans. Mechatronics , vol.9 , Issue.2 , pp. 384-391
    • Verma, S.1    Kim, W.J.2    Gu, J.3
  • 46
    • 33750400209 scopus 로고    scopus 로고
    • A comparative study of MEMS microactuators for use in a dual-stage servo with an instrumented suspension
    • Oct
    • X. H. Huang, R. Horowitz, and Y. F. Li, "A comparative study of MEMS microactuators for use in a dual-stage servo with an instrumented suspension," IEEE/ASME Trans. Mechatronics, vol. 11, no. 5, pp. 524-532, Oct. 2006.
    • (2006) IEEE/ASME Trans. Mechatronics , vol.11 , Issue.5 , pp. 524-532
    • Huang, X.H.1    Horowitz, R.2    Li, Y.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.