A dynamic 3-D surface profilometer with nanoscale measurement resolution and MHz bandwidth for MEMS characterization

IEEE/ASME Transactions on Mechatronics

Volumn 12, Issue 3, 2007, Pages 299-307

  Chen, Liang Chia ^a   Huang, Yao Ting ^a   Fan, Kuang Chao ^b,c  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Dynamic profilometry; Integrated mechatronics; Microelectromechanical systems (MEMS) dynamic characterization; Stroboscopic interferometry

Indexed keywords

BANDWIDTH; INTERFEROMETRY; MEMS; MICROMETERS; NATURAL FREQUENCIES; PROFILOMETRY; STROBOSCOPES; VIBRATIONS (MECHANICAL);

DYNAMIC BANDWIDTH; DYNAMIC PROFILOMETRY; INTEGRATED MECHATRONICS; RESONANT VIBRATION; STROBOSCOPIC INTERFEROMETRY;

MECHATRONICS;

EID: 34347379301     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2007.897268     Document Type: Article

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