A magnetically driven linear microactuator with new driving method

IEEE/ASME Transactions on Mechatronics

Volumn 10, Issue 3, 2005, Pages 335-338

  Komori, Mochimitsu ^a   Hirakawa, Takehiro ^a,b  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b RICOH COMPANY LTD   (Japan)

Author keywords

Linear drive; Linear PM motor; Magnetic attractive force; Magnetic drive; Microactuator

Indexed keywords

ELECTRIC COILS; ELECTRIC CURRENTS; PERMANENT MAGNETS; PHOTOLITHOGRAPHY; STATORS;

LINEAR DRIVE; LINEAR PM MOTOR; MAGNETIC ATTRACTIVE FORCE; MAGNETIC DRIVE;

MICROACTUATORS;

EID: 23044509614     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2005.848294     Document Type: Article

References (5)

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