Closed-loop optimal control-enabled piezoelectric microforce sensors

IEEE/ASME Transactions on Mechatronics

Volumn 11, Issue 4, 2006, Pages 420-427

  Shen, Yantao ^a,b   Winder, Eric ^b   Xi, Ning ^a,b,c   Pomeroy, Craig A ^a,b   Wejinya, Uchechukwu C ^a,b  

^a IEEE   (United States)

^b Michigan State University   (United States)

^c SHENYANG INSTITUTE OF AUTOMATION   (China)

Author keywords

Actuator; Force balance; Force sensor; Microautomation; Microrobotics; Optimal control; Polyvinylidene fluoride (PVDF)

Indexed keywords

FORCE BALANCE; FORCE SENSORS; MICROAUTOMATION; MICROROBOTICS; OPTIMAL CONTROL; POLYVINYLIDENE FLUORIDE (PVDF);

CLOSED LOOP CONTROL SYSTEMS; IMAGE SENSORS; OPTIMAL CONTROL SYSTEMS; ORGANIC POLYMERS; ROBOTICS; SERVOMECHANISMS;

PIEZOELECTRIC ACTUATORS;

EID: 33947128082     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2006.878555     Document Type: Article

References (18)

1. S. Fatikow, J. Seyfried, S. Fahlbusch, A. Buerkle, and F. Schmoeckel, "A flexible microrobot-based microassembly station," J. Intell. Robot. Syst., vol. 27, pp. 135-169, 2000.
2. P. G. Datskos, T. Thundat, and N. V. Lavrik, "Micro and nanocantilever sensors," in Encyclopedia of Nanoscience and Nanotechnology, H. S. Nalwa, Ed. American Scientific Publishers, vol. X, pp. 1-10, 2004.
3. G. A. Gehring, M. D. Cooke, I. Gregory, W. Karl, and R. Watts, "Cantilever unified theory and optimization for sensors and actuators," Smart Mater. Struct., vol. 9, pp. 918-931, 2000.
4. G. Binnig, C. F. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, no. 9, p. 930, 1986.
5. K. H. Chau, S. R. Lewis, Y. Zhao, S. F. Bart, R. G. Marcheselli, and R. T. Howe, "An integrated force-balanced capacitive accelerometer for low-G applications," Sens. Actuators A Phys., vol. 54, pp. 472-476, 1996.
6. Y. Sun, D. P. Potasek, D. Piyabongkarn, R. Rajamani, and B. J. Nelson, "Actively servoed multi-axis microforce sensors," in Proc. ICRA 2003, pp. 294-299.
7. M. S. Weinberg, "Working equations for piezoelectric actuators and sensors," J. Microelectromech. Syst., vol. 8, no. 4, pp. 529-533, Dec. 1999.
8. D. L. DeVoe and A. P. Pisano, "Modeling and optimal design of piezoelectric cantilever microactuators," J. Microelectromech. Syst., vol. 6, no. 3, pp. 266-270, Sep. 1997.
9. An American National Standard: IEEE Standard on Piezoelectricity, ANS/IEEE Standard 176-1987.
10. L. Meirovitch, Analytical Methods in Vibration. New York: MacMillan, 1967.
11. _, Dynamics and Control of Structures. New York: Wiley, 1990, ch. 6.
12. T. E. Alberts, T. V. DuBois, and H. R. Pota, "Experimental verification of transfer functions for a slewing piezoelectric laminate beam," Control Eng. Pract., vol. 3, no. 2, pp. 163-170, 1995.
13. S.O. Reza Moheimani, "Experimental verification of the corrected transfer function of a piezoelectric laminate beam," IEEE Trans. Control Syst. Technol., vol. 8, no. 4, pp. 660-666, Jul. 2000.
14. C. K. Lee and F.C. Moon, "Modal sensors/actuators," Trans. ASME, vol. 57, pp. 434-441, 1990.
15. Y. T. Shen, N. Xi, and W. J. Li, "Force guided assembly of micro mirrors," in Proc. IROS 2003, vol. 3, pp. 2149-2154.
16. J. G. Smits and W. Choi, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 38, no. 3, pp. 256-270, May 1991.
17. D.-H. Kim, M. G. Lee, B. Kim, and Y. Sun, "A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric sensors: A numerical and experimental study," Smart Mater. Struct., vol. 14, pp. 1265-1272, 2005.
18. D.-H. Kim, B. Kim, and H. J. Kang, "Development of a piezoelectric polymer-based sensorized microgripper for micromanipulation and microassembly," Microsyst. Technol., vol. 10, no. 4, pp. 275-280, 2004.