Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation

IEEE/ASME Transactions on Mechatronics

Volumn 10, Issue 2, 2005, Pages 161-171

  Pérez, Ricardo ^a   Agnus, Joël ^a   Clévy, Cédric ^a   Hubert, Arnaud ^a   Chaillet, Nicolas ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Control; Microgripper; Micromanipulation; Microrobotics; Modeling; Piezoactuators

Indexed keywords

BOUNDARY CONDITIONS; DEGREES OF FREEDOM (MECHANICS); END EFFECTORS; FEEDBACK CONTROL; GRIPPERS; MATHEMATICAL MODELS; MICROMANIPULATORS; PIEZOELECTRIC DEVICES; ROBOTICS; SCANNING ELECTRON MICROSCOPY; SENSORS; VOLTAGE CONTROL;

MICROGRIPPER; MICROGRIPPER MICROROBOT ON CHIP; MICROROBOTICS; PIEZOACTUATORS;

ACTUATORS;

EID: 18844439911     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2005.844712     Document Type: Article

References (25)

1. H. Miyazaki and T. Sato, "Mechanical assembly of three-dimensional microstructures from tine particles," Adv. Robot., vol. 11, no. 2, pp. 169-185, 1997.
2. H. T. Miyazaki, Y. Tomizawa, K. Koyano. T. Sato, and N. Shinya, "Adhesion force measurement system for microobjects in a scanning electron microscope," Rev. Scientific Instrum., vol. 71, no. 8, pp. 3123-3131, 2000.
3. K. Koyano and T. Sato, "Micro object handling system with concentrated visual fields and new handling skills," Proc. SPIE, vol. 2906, pp. 130-140, 2003.
4. S. T. Smits and D. G. Chetwynd, "Foundation mechanism design," in Developments in Nanotechnology, K. K. Bowen, Ed. Warwick, U.K.: Gordon and Breach Science, 1999, vol. 2.
5. K. Uchino, Piezoelectric Actuators and Ultrasonic Motors, H. L. Tuller, Ed. New York: Academic, 1997.
6. T. Tanikawa, M. Kawai, N. Koyachi, T. Arai, T. Ide, S. Kaneko, R. Ohta, and T. Hirose, "Force control system for autonomous micro manipulation," in Proc. IEEE. Int. Conf. Robotics and Automation, Seoul, Korea, 2001, pp. 610-615.
7. Y. Shen, N. Xi, W. J. Li, and J. Tan, "A high sensitivity force sensor for microassembly: Design and experiments," in Proc. IEEE /ASME. Int. Conf. Advanced Intelligent Mechatronics, vol. 2, 2003, pp. 703-708.
8. Piezoelectric Ceramics and Components, PI ceramic, 1998.
9. V. Soundararajan and V. Radhakrishnan, "An experimental investigation on the basic mechanisms involved in ultrasonic machining," Int. Mach. Tool Des. Res., vol. 26, no. 3, pp. 307-321, 1986.
10. S. Ballandras, P. Maître, P. Guine, N. Bourriot, W. Steichen, B. Piranda, and J. F. Gelly, "New results on miniaturised annular arrays built using ultrasound micromachining," in Proc. IEEE Ultrasonics Symp., 1999. pp. 1159-1162.
11. J. G. Smits, S. I. Dalke, and T. K. Cooney, "The constituent equations of piezoelectric bimorphs," Sens. Actuators A, vol. 28, pp. 41-61, 1991.
12. P. De Lit, J. Agnus, and N. Chaillet, "The constitutive equations of a piezoelectric duo-bimorph," in Proc. 5th IEEE. Int. Symp. Assembly and Task Planning, Besançon, France, Jul. 2003, pp. 1-6.
13. Q.-M. Wang, X.-H. Du, B. Xu, and L. E. Cross, "Electromechanical coupling and output efficiency of piezoelectric bending actuators," IEEE Trans. Ultras., Ferroelectr., Freq. Contr., vol. 46, no. 3, pp. 638-646, Mar. 1999.
14. IEEE Standard on Piezoelectricity, ANSI/IEEE Std. 176, 1998.
15. R. Pérez, J. Agnus, J.-M. Breguet, N. Chaillet, H. Bleuler, and R. Clavel, "Characterization and control of a 1 DoF monolithic piezoactuator (MPA)," Proc. SPIE, pp. 151-162, 2001.
16. P. Ge and M. Jouaneh, "Tracking control of a piezoceramic actuator," IEEE Trans. Contr., Syst. Technol., vol. 4, no. 3, pp. 209-216, Mar. 1996.
17. M. Goldfarb and N. Celanovic, "Modeling piezoelectric stack actuators for control of micromanipulation," IEEE Contr. Syst. Mag., vol. 17, no. 3, pp. 69-79, Jun. 1997.
18. A. J. Fleming and S. O. R. Moheimani, "Improve current and charge amplifiers for driving piezoelectric loads, and issues in signal processing design for synthesis of shunt damping circuits," J. Intell. Mater. Syst. Structures, vol. 15, no. 2, pp. 77-92, 2004.
19. S. O. R. Moheimani, J. Fleming, and S. Behrens, "Dynamics, stability, and control of multivariable piezoelectric schunts," IEEE/ASME Trans. Mechatron., vol. 9, no. 3, pp. 87-99, Mar. 2004.
20. R. Comstock, "Charge control of piezoelectric actuators to reduce hysteresis effects," U.S. Patent 4 263 527, 1981.
21. J. Main, E. Garcia, and D. Newton, "Precision position control of piezoelectric actuators using charge feedback," J. Guidance, Contr. Dynamics, vol. 18, no. 5, pp. 1068-1073, 1995.
22. C. Newcomb and I. Flinn, "Improving the linearity of piezoelectric ceramic actuators," Electron. Lett., vol. 18, no. 11, pp. 442-443, 1982.
23. D. Newton, J. Main, and E. Garcia, "Piezoelectric actuation systems: Optimization of driving electronics," in Proc. SPIE, vol. 2717, 1996, pp. 259-266.
24. H. Janocha. D. Jendritza, and P. Scheer, "Smart actuators with piezoelectric materials," in Proc. 3rd ICIM/ECSSM Conf., 1996, pp. 603-609.
25. H. Janocha and K. Kuhnen, "Real-time compensation of hysteresis and creep in piezoelectric actuators," J. Sens. Actuators, vol. 79, pp. 83-89, 2000.