메뉴 건너뛰기




Volumn 12, Issue 1, 2007, Pages 23-31

Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling

Author keywords

Distributed micro motion system (DMMS); Electrostatic actuator; High voltage IC; Microelectromechanical system (MEMS); Microrobot; Remote control; Wireless powering

Indexed keywords

MICROELECTROMECHANICAL DEVICES; POWER INTEGRATED CIRCUITS; REMOTE CONTROL; SIGNAL RECEIVERS;

EID: 33947401487     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2006.886245     Document Type: Article
Times cited : (32)

References (35)
  • 1
    • 0029270102 scopus 로고
    • "A low-power transponder IC for high-performance identification systems"
    • U. Kaiser and W. Steinhagen, "A low-power transponder IC for high-performance identification systems," J. Solid-State Circuits, vol. 30, no. 3, pp. 306-310, 1995.
    • (1995) J. Solid-State Circuits , vol.30 , Issue.3 , pp. 306-310
    • Kaiser, U.1    Steinhagen, W.2
  • 2
    • 0036143086 scopus 로고    scopus 로고
    • "A passive wireless integrated humidity sensor"
    • T. J. Harpster, B. Stark, and K. Najafi, "A passive wireless integrated humidity sensor," Sens. Actuators, vol. A95, pp. 100-107, 2002.
    • (2002) Sens. Actuators , vol.A95 , pp. 100-107
    • Harpster, T.J.1    Stark, B.2    Najafi, K.3
  • 3
    • 0032123869 scopus 로고    scopus 로고
    • "A 05 mW passive telemetry IC for biomedical applications"
    • Q. Huang and M. Oberle, "A 05 mW passive telemetry IC for biomedical applications," J. Solid-State Circuits, vol. 33, no. 7, pp. 937-946, 1998.
    • (1998) J. Solid-State Circuits , vol.33 , Issue.7 , pp. 937-946
    • Huang, Q.1    Oberle, M.2
  • 4
    • 0026983633 scopus 로고
    • "A self-tuning digital telemetry IC for use in a microprocessor-based implantable instrument"
    • K. W. Fernald, J. J. Paulos, B. A. Stackhouse, and R. A. Heaton, "A self-tuning digital telemetry IC for use in a microprocessor-based implantable instrument," J. Solid-State Circuits, vol. 27, no. 12, pp. 1826-1832, 1992.
    • (1992) J. Solid-State Circuits , vol.27 , Issue.12 , pp. 1826-1832
    • Fernald, K.W.1    Paulos, J.J.2    Stackhouse, B.A.3    Heaton, R.A.4
  • 5
    • 0033704280 scopus 로고    scopus 로고
    • "Electrodeposited copper inductors for intraocular pressure telemetry"
    • R. Puers, G. Vandevoorde, and D. De Bruyker, "Electrodeposited copper inductors for intraocular pressure telemetry," J. Micromech. Microeng., vol. 10, pp. 124-129, 2000.
    • (2000) J. Micromech. Microeng. , vol.10 , pp. 124-129
    • Puers, R.1    Vandevoorde, G.2    De Bruyker, D.3
  • 6
    • 0031673232 scopus 로고    scopus 로고
    • "A wireless implantable multichannel digital neural recording system for a micromachined sieve electrode"
    • T. Akin, K. Najafi, and R. M. Bradley, "A wireless implantable multichannel digital neural recording system for a micromachined sieve electrode," J. Solid-State Circuits, vol. 33, no. 1, pp. 109-118, 1998.
    • (1998) J. Solid-State Circuits , vol.33 , Issue.1 , pp. 109-118
    • Akin, T.1    Najafi, K.2    Bradley, R.M.3
  • 9
    • 0028427450 scopus 로고
    • "Microrobot actuated by a vibration energy field"
    • T. Yasuda, I. Shimoyama, and H. Miura, "Microrobot actuated by a vibration energy field," Sens. Actuators A, Phys., vol. 43, pp. 366-370, 1994.
    • (1994) Sens. Actuators A, Phys. , vol.43 , pp. 366-370
    • Yasuda, T.1    Shimoyama, I.2    Miura, H.3
  • 11
    • 0032665784 scopus 로고    scopus 로고
    • "Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles"
    • in Jan. 17-21
    • P. E. Kladitis, V. M. Bright, K. F. Harsh, and Y. C. Lee, "Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles," in Proc. 12th IEEE Int. Conf. Micro Electro Mech. Syst. Jan. 17 21, 1999, pp. 570-575.
    • (1999) Proc. 12th IEEE Int. Conf. Micro Electro Mech. Syst. , pp. 570-575
    • Kladitis, P.E.1    Bright, V.M.2    Harsh, K.F.3    Lee, Y.C.4
  • 14
    • 0027876248 scopus 로고
    • "Fabrication and operation of polyimide bimorph actuators for a ciliary motion system"
    • M. Ataka, A. Omodaka, N. Takeshima, and H. Fujita, "Fabrication and operation of polyimide bimorph actuators for a ciliary motion system," J. Microelectromech. Syst., vol. 2, no. 4, pp. 146-150, 1993.
    • (1993) J. Microelectromech. Syst. , vol.2 , Issue.4 , pp. 146-150
    • Ataka, M.1    Omodaka, A.2    Takeshima, N.3    Fujita, H.4
  • 16
    • 0035426046 scopus 로고    scopus 로고
    • "Wireless energy transfer for stand-alone systems: A comparison between low and high power applicability"
    • G. Vandevoorde and R. Puers, "Wireless energy transfer for stand-alone systems: A comparison between low and high power applicability," Sens. Actuators A, Phys., vol. 92, pp. 305-311, 2001.
    • (2001) Sens. Actuators A, Phys. , vol.92 , pp. 305-311
    • Vandevoorde, G.1    Puers, R.2
  • 17
    • 0036141572 scopus 로고    scopus 로고
    • "Selective drive of electrostatic actuators using remote inductive powering"
    • S. Takeuchi and I. Shimoyama, "Selective drive of electrostatic actuators using remote inductive powering," Sens. Actuators, vol. A95, pp. 269-273, 2002.
    • (2002) Sens. Actuators , vol.A95 , pp. 269-273
    • Takeuchi, S.1    Shimoyama, I.2
  • 18
    • 0027668109 scopus 로고
    • "Fabrication of distributed electrostatic micro actuator (DEMA )"
    • K. Minami, S. Kawamura, and M. Esashi, "Fabrication of distributed electrostatic micro actuator (DEMA)," J. Microelectromech. Syst., vol. 2, no. 3, pp. 121-127, 1993.
    • (1993) J. Microelectromech. Syst. , vol.2 , Issue.3 , pp. 121-127
    • Minami, K.1    Kawamura, S.2    Esashi, M.3
  • 19
    • 0030205904 scopus 로고    scopus 로고
    • "Future of actuators and microsystems"
    • H. Fujita, "Future of actuators and microsystems," Sens. Actuators, vol. A56, pp. 105-106, 1996.
    • (1996) Sens. Actuators , vol.A56 , pp. 105-106
    • Fujita, H.1
  • 20
    • 0028449490 scopus 로고
    • "A conveyance system using air flow based on the concept of distributed micro motion systems"
    • S. Konishi and H. Fujita, "A conveyance system using air flow based on the concept of distributed micro motion systems," J. Microelectromech. Syst., vol. 3, no. 2, pp. 54-58, 1994.
    • (1994) J. Microelectromech. Syst. , vol.3 , Issue.2 , pp. 54-58
    • Konishi, S.1    Fujita, H.2
  • 24
    • 85010093027 scopus 로고    scopus 로고
    • "Fabrication of an inverted scratch drive actuator for a powerful and precise conveyance system"
    • Y. Mita, D. Collard, M. Mita, and H. Fujita, "Fabrication of an inverted scratch drive actuator for a powerful and precise conveyance system," Trans. Inst. Electr. Eng. Jpn., vol. 119E, pp. 1-2, 1999.
    • (1999) Trans. Inst. Electr. Eng. Jpn. , vol.119 E , pp. 1-2
    • Mita, Y.1    Collard, D.2    Mita, M.3    Fujita, H.4
  • 27
    • 0035424291 scopus 로고    scopus 로고
    • "3-D self-assembling and actuation of electrostatic micro-structures"
    • Aug
    • E. Quevy, L. Buchaillot, and D. Collard, "3-D self-assembling and actuation of electrostatic micro-structures," IEEE Trans. Electron Devices, vol. 48, no. 8, pp. 1833-1839, Aug. 2001.
    • (2001) IEEE Trans. Electron Devices , vol.48 , Issue.8 , pp. 1833-1839
    • Quevy, E.1    Buchaillot, L.2    Collard, D.3
  • 30
    • 0031146007 scopus 로고    scopus 로고
    • "A 1.8-GHz low phase noise CMOS VCO using optimized hollow spiral inductors"
    • May
    • J. Craninckx and M. S. J. Steyaert, "A 1.8-GHz low phase noise CMOS VCO using optimized hollow spiral inductors," IEEE J. Solid-State Circuits, vol. 32, no. 5, pp. 736-744, May 1997.
    • (1997) IEEE J. Solid-State Circuits , vol.32 , Issue.5 , pp. 736-744
    • Craninckx, J.1    Steyaert, M.S.J.2
  • 31
    • 0035982566 scopus 로고    scopus 로고
    • "Process and realization of a 3-D gold electroplated antenna on a flexible epoxy film for wireless micro-motion system"
    • Jul./Aug
    • P. Basset, A. Kaiser, D. Collard, and L. Buchaillot, "Process and realization of a 3-D gold electroplated antenna on a flexible epoxy film for wireless micro-motion system," J. Vac. Sci. Technol., vol. B20, no. 4, pp. 1465-1470, Jul./Aug. 2002.
    • (2002) J. Vac. Sci. Technol. , vol.B20 , Issue.4 , pp. 1465-1470
    • Basset, P.1    Kaiser, A.2    Collard, D.3    Buchaillot, L.4
  • 32
    • 33947410239 scopus 로고    scopus 로고
    • "A 32 bit 100 V switching array IC ready-to-use for everyone through multi-chip foundry service"
    • B. Stefanelli, Y. Mita, A. Kaiser, and H. Fujita, "A 32 bit 100 V switching array IC ready-to-use for everyone through multi-chip foundry service," in Proc. Transducer'99, pp. 822-823.
    • Proc. Transducer'99 , pp. 822-823
    • Stefanelli, B.1    Mita, Y.2    Kaiser, A.3    Fujita, H.4
  • 33
    • 0031098222 scopus 로고    scopus 로고
    • "Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS"
    • T. Akiyama, D. Collard, and H. Fujita, "Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS," J. Microelectromech. Syst., vol. 6, pp. 10-17, 1997.
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 10-17
    • Akiyama, T.1    Collard, D.2    Fujita, H.3
  • 34
    • 0032075292 scopus 로고    scopus 로고
    • "On-chip spiral inductors with patterned ground shields for Si-based RF IC's"
    • May
    • C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," J. Solid-State Circuits, vol. 33, no. 5, pp. 743-747, May 1998.
    • (1998) J. Solid-State Circuits , vol.33 , Issue.5 , pp. 743-747
    • Yue, C.P.1    Wong, S.S.2
  • 35
    • 85116610435 scopus 로고    scopus 로고
    • "Next century challenges: Mobile networking for smart dust"
    • in Seattle, WA, Aug. 17-19
    • J. M. Kahn, R. H. Katz, and K. S. J. Pister, "Next century challenges: Mobile networking for smart dust," in Proc. ACM/IEEE Int. Conf. Mobile Comput. Netw., Seattle, WA, Aug. 17-19, 1999, pp. 271-287.
    • (1999) Proc. ACM/IEEE Int. Conf. Mobile Comput. Netw. , pp. 271-287
    • Kahn, J.M.1    Katz, R.H.2    Pister, K.S.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.