Microfabricated electrostatic actuators for hard disk drives

IEEE/ASME Transactions on Mechatronics

Volumn 3, Issue 3, 1998, Pages 175-183

  Horsley, David A ^b,c   Horowitz, Roberto ^a,b   Pisano, Albert P ^a,b,d  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c DiCon Fiberoptics   (United States)

^d DEFENSE ADVANCED RESEARCH PROJECTS AGENCY   (United States)

Author keywords

Disk drive; Electrostatic actuation; Microfabrication; Servo control

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COST EFFECTIVENESS; ELECTROSTATIC DEVICES; HARD DISK STORAGE; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; POSITION CONTROL; SERVOMECHANISMS;

ELECTROSTATIC MICROACTUATORS; HARD DISK DRIVES;

MICROACTUATORS;

EID: 0032167295     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.712113     Document Type: Article

References (17)

1. N. Schirle, "Key mechanical technologies for hard disk drives," presented at the Int. Conf. Micromechatronics for Information and. Precision Equipment, Tokyo, Japan, July 1997, Paper MR-K1.
2. J. Ishikawa and M. Tomizuka, "Pivot friction compensation using an accelerometer and a disturbance observer for hard disk drives," in Proc. ASME Conf. Information Storage and Processing Systems, 1997, vol. 3, pp. 83-89.
3. L.-S. Fan, H. H. Ottesen, T. C. Reiley, and R. W. Wood, "Magnetic recording-head positioning at very high track densities using a microactuator-based, two-stage servo system," IEEE Trans. Ind. Electron., vol. 42, pp. 222-233, June 1995.
4. C. D. Mee and E. D. Daniel, Magnetic Storage Handbook, 2nd ed. New York: McGraw-Hill, 1996.
5. S. Koganezawa, K. Takaishi, Y. Mizoshita, Y. Uematsu, and T. Yamada, "Development of integrated piggyback milli-actuator for high-density magnetic recording," presented at the Int. Conf. Micromechatronics for Information and Precision Equipment, Tokyo, Japan, July 1997, Paper MR-08.
6. T. Imamura, T. Koshikawa, and M. Katayama, "Transverse mode electrostatic microactuator for MEMS-based HDD slider," in Proc. 9th Int. Workshop Micro Electro Mechanical Systems (MEMS '96), San Diego, CA, Feb. 1996, pp. 216-221.
7. W. Tang, V. Temesvary, R. Miller, A. Desai, Y. C. Tai, and D. K. Miu, "Silicon micromachined electromagnetic microactuators for rigid disk drives," IEEE Trans. Magn., vol. 31, pp. 2964-2966, Nov. 1995.
8. W. A. Clark, R. T. Howe, and R. Horowitz, "Surface micromachined z-axis vibratory rate gyroscope," in Proc. 1996 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1996, pp. 283-287.
9. K. Petersen, "Silicon as a mechanical material," Proc. IEEE, vol. 70, pp. 420-457, May 1982.
10. W. N. Sharpe, Jr., B. Yuan, R. Vaidyanathan, and R. L. Edwards, "Measurements of young's modulus, Poisson's ratio, and tensile strength of polysilicon," in Proc. 10th Int. Workshop Micro Electro Mechanical Systems (MEMS '97), Nagoya, Japan, Feb. 1997, pp. 424-429.
11. R. T. Howe, "Surface micromachining for microsensors and microactuators," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. vol. 6, no. 6, pp. 1809-1813, Nov./Dec. 1988.
12. J. K. Bhardwaj, H. Ashraf, and A. McQuarrie, "Dry silicon etching for MEMS," presented at the Symp. Microstructures and Microfabricated Systems, Electrochemical Society Annu. Meeting, Montreal, P.Q., Canada, May 1997.
13. T. J. Brosnihan, J. M. Bustillo, A. P. Pisano, and R. T. Howe, "Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments," in Proc. 1997 Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 637-640.
14. C. G. Keller and M. Ferrari, "Milli-scale polysilicon structures," in Proc. 1994 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1994, pp. 132-137.
15. M. B. Cohn, Y. Liang, R. T. Howe, and A. P. Pisano, "Wafer-to-wafer transfer of microstructures for vacuum packaging," in Proc. 1996 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1996, pp. 32-35.
16. D. A. Horsley, A. Singh, A. P. Pisano, and R. Horowitz, "Angular micropositioner for disk drives," in Proc. 10th Int. Workshop Micro Electro Mechanical Systems (MEMS '97), Nagoya, Japan, Feb. 1997, pp. 454-459.
17. P. Favrat, L. Paratte, H. Ballan, M. Declerq, and N. F. deRooij, "A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor," in Proc. 9th Int. Workshop Micro Electro Mechanical Systems (MEMS'96), San Diego, CA, Feb. 1996, pp. 25-31.