Nanoscale path planning and motion control with maglev positioners

IEEE/ASME Transactions on Mechatronics

Volumn 11, Issue 5, 2006, Pages 625-633

  Shakir, Huzefa ^a   Kim, Won Jong ^a  

^a Texas AandM University   (United States)

Author keywords

Maglev system; Multivariable optimal control; Nanomanipulation; Nanomanufacturing; Nanoscale path planning; Precision positioning

Indexed keywords

MANUFACTURE; MOTION CONTROL; MOTION PLANNING; MULTIVARIABLE CONTROL SYSTEMS; OPTIMAL CONTROL SYSTEMS;

MAGLEV SYSTEM; MULTIVARIABLE OPTIMAL CONTROL; NANOMANIPULATION; NANOMANUFACTURING; NANOSCALE MOTION CONTROL; NANOSCALE PATH PLANNING; PRECISION POSITIONING;

NANOTECHNOLOGY;

EID: 33750399253     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2006.882995     Document Type: Article

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