Thin film shape memory alloys and microactuators

International Journal of Computational Materials Science and Surface Engineering

Volumn 2, Issue 3-4, 2009, Pages 208-226

  Fu, Y Q ^a   Luo, J K ^b   Flewitt, A J ^c   Huang, W M ^d   Zhang, S ^d   Du, H J ^d   Milne, W I ^c  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF BOLTON   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^d NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

MEMS; Micro electro mechanical system; Shape memory; Thin films; TiNi

Indexed keywords

BINARY ALLOYS; BIOCOMPATIBILITY; DIGITAL STORAGE; MEMS; MICROACTUATORS; OPTICAL DATA STORAGE; SHAPE-MEMORY ALLOY; STRESS RELIEF; TEXTURES; TITANIUM ALLOYS;

CRYSTAL NUCLEATION AND GROWTHS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO ELECTRO MECHANICAL SYSTEM; NANO-INDENTATION METHODS; SHAPE MEMORY; TEMPERATURE MEMORY EFFECTS; THIN-FILM SHAPE MEMORY ALLOYS; TINI;

THIN FILMS;

EID: 68949083387     PISSN: 17533465     EISSN: 17533473     Source Type: Journal    
DOI: 10.1504/IJCMSSE.2009.027483     Document Type: Article

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