Fabrication and characterization of Ti-Ni shape memory thin film using Ti/Ni multilayer technique

Science and Technology of Advanced Materials

Volumn 6, Issue 6, 2005, Pages 678-683

  Cho, H ^a   Kim, H Y ^a   Miyazaki, S ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Alloying process; Multilayer; Shape memory alloy; Shape memory effect; Sputtering; Thin film; Ti Ni

Indexed keywords

CRYSTALLINE MATERIALS; FABRICATION; MAGNETRON SPUTTERING; MULTILAYERS; NICKEL; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; TITANIUM;

ALLOYING PROCESS; INTER DIFFUSION; TI-NI;

THIN FILMS;

EID: 27844438976     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.stam.2005.05.006     Document Type: Article

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