Three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recording

Journal of Microelectromechanical Systems

Volumn 9, Issue 1, 2000, Pages 24-31

  Takeuchi, Shoji ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; ETCHING; HYDROGEN INORGANIC COMPOUNDS; IMPLANTS (SURGICAL); MAGNETRON SPUTTERING; MICROACTUATORS; NEUROLOGY; SHAPE MEMORY EFFECT; TEMPERATURE MEASUREMENT; THIN FILMS; THREE DIMENSIONAL; TITANIUM COMPOUNDS;

FREE MOVING INSECT; INSECT NEURAL RECORDING; SHAPE MEMORY ALLOY THIN FILM;

MICROELECTRODES;

EID: 0033901773     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.825773     Document Type: Article

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