Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets

Sensors and Actuators, A: Physical

Volumn 86, Issue 3, 2000, Pages 165-170

  Ohta, A ^a   Bhansali, S ^a   Kishimoto, I ^a   Umeda, A ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFERENTIAL SCANNING CALORIMETRY; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SPUTTERING; TITANIUM ALLOYS; VACUUM TECHNOLOGY; X RAY DIFFRACTION ANALYSIS;

SHAPE RECOVERY BEHAVIOR;

METALLIC FILMS;

EID: 0034324039     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00449-0     Document Type: Article

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