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Journal of Microelectromechanical Systems

Volumn 11, Issue 1, 2002, Pages 68-77

Three-dimensional thin-film shape memory alloy microactuator with two-way effect

(3) Gill, John J b,c Ho, Ken a,b,d Carman, Greg P b

a IEEE

b UNIVERSITY OF CALIFORNIA (United States)

c CALIFORNIA INSTITUTE OF TECHNOLOGY (United States)

d Shape Change Technologies (United States)

Author keywords

Nickel titanium (NiTi); Shape memory alloy; Thin film; Three dimensional (3 D) transformation; Two way effect

Indexed keywords

CHROMIUM; ETCHING; NICKEL COMPOUNDS; RESIDUAL STRESSES; SHAPE MEMORY EFFECT; SILICON WAFERS; SPUTTER DEPOSITION; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMAL EFFECTS; THIN FILMS; THREE DIMENSIONAL; ULTRAHIGH VACUUM;

ADHESION LAYER; DEIONIZED WATER; ETCH MASKS; TRANSFORMATION TEMPERATURE; TWO WAY EFFECT; WET ETCHING;

MICROACTUATORS;

EID: 0036475497 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.982865 Document Type: Article

Times cited : (78)

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