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Volumn 15, Issue 2, 2006, Pages

In situ characterization of NiTi based shape memory thin films by optical measurement

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SCANNING CALORIMETRY; NICKEL COMPOUNDS; PHASE TRANSITIONS; THIN FILMS; TITANIUM COMPOUNDS;

EID: 33645035182     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/15/2/N01     Document Type: Article
Times cited : (15)

References (11)
  • 2
    • 3042800767 scopus 로고    scopus 로고
    • Micro NiTi-Si cantilever with three stable positions
    • 10.1016/j.sna.2004.02.027 0924-4247 A
    • Huang W M, Liu Q Y, He L M and Yeo J H 2004 Micro NiTi-Si cantilever with three stable positions Sensors Actuators A 114 118-22
    • (2004) Sensors Actuators , vol.114 , pp. 118-122
    • Huang, W.M.1    Liu, Q.Y.2    He, L.M.3    Yeo, J.H.4
  • 3
    • 2342629966 scopus 로고    scopus 로고
    • TiNi-based thin films in MEMS applications: A review
    • 10.1016/j.sna.2004.02.019 0924-4247 A
    • Fu Y, Du H, Huang W, Zhang S and Hu M 2004 TiNi-based thin films in MEMS applications: a review Sensors Actuators A 112 395-408
    • (2004) Sensors Actuators , vol.112 , pp. 395-408
    • Fu, Y.1    Du, H.2    Huang, W.3    Zhang, S.4    Hu, M.5
  • 4
    • 0036467599 scopus 로고    scopus 로고
    • On the selection of shape memory alloys for actuators
    • 0264-1275
    • Huang W M 2002 On the selection of shape memory alloys for actuators Mater. Des. 23 11-9
    • (2002) Mater. Des. , vol.23 , pp. 11-19
    • Huang, W.M.1
  • 5
    • 0035415185 scopus 로고    scopus 로고
    • Characterization of TiNi shape-memory alloy thin films for MEMS applications
    • 10.1016/S0257-8972(01)01324-X 0257-8972
    • Fu Y, Huang W, Du H, Huang X, Tan J and Gao X 2001 Characterization of TiNi shape-memory alloy thin films for MEMS applications Surf. Coat. Technol. 145 107
    • (2001) Surf. Coat. Technol. , vol.145 , Issue.1-3 , pp. 107
    • Fu, Y.1    Huang, W.2    Du, H.3    Huang, X.4    Tan, J.5    Gao, X.6
  • 6
    • 0032185887 scopus 로고    scopus 로고
    • Applications of shape memory alloys in optics
    • 0003-6935
    • Sutapun B, Tabib-Azar M and Huff M A 1998 Applications of shape memory alloys in optics Appl. Opt. 37 6811
    • (1998) Appl. Opt. , vol.37 , Issue.28 , pp. 6811
    • Sutapun, B.1    Tabib-Azar, M.2    Huff, M.A.3
  • 7
    • 0036440348 scopus 로고    scopus 로고
    • Micro mirror based on surface relief phenomenon in shape memory alloys
    • 10.1117/12.483060 0277-786X
    • Huang W M, Zhang W H and Gao X Y 2002 Micro mirror based on surface relief phenomenon in shape memory alloys Proc. SPIE 4918 155
    • (2002) Proc. SPIE , vol.4918 , pp. 155
    • Huang, W.M.1    Zhang, W.H.2    Gao, X.Y.3
  • 8
    • 0025698123 scopus 로고
    • Thin-film processing of TiNi shape memory alloy
    • 10.1016/0924-4247(90)85047-8 0924-4247 A
    • Walker J A, Gabriel K J and Mehregany M 1990 Thin-film processing of TiNi shape memory alloy Sensors Actuators A 21 243
    • (1990) Sensors Actuators , vol.21 , Issue.1-3 , pp. 243
    • Walker, J.A.1    Gabriel, K.J.2    Mehregany, M.3
  • 9
    • 5744247297 scopus 로고    scopus 로고
    • Characterization of sputtering deposited NiTi shape memory thin films using temperature controllable atomic force microscope
    • 0964-1726 001
    • He Q, Huang W M, Hong M H, Wu M J, Fu Y Q, Chong T C, Chollet F and Du H J 2004 Characterization of sputtering deposited NiTi shape memory thin films using temperature controllable atomic force microscope Smart Mater. Struct. 13 977-82
    • (2004) Smart Mater. Struct. , vol.13 , Issue.5 , pp. 977-982
    • He, Q.1    Huang, W.M.2    Hong, M.H.3    Wu, M.J.4    Fu, Y.Q.5    Chong, T.C.6    Chollet, F.7    Du, H.J.8
  • 10
    • 33645030019 scopus 로고    scopus 로고
    • MTI Instruments Inc
    • MTI-2000 Fotonic Sensor, MTI Instruments Inc http://www.mtiinstruments. com/
    • MTI-2000 Fotonic Sensor
  • 11
    • 0018530576 scopus 로고
    • Fiber optic lever displacement transducer
    • 0003-6935
    • Cook R O and Hamm C W 1979 Fiber optic lever displacement transducer Appl. Opt. 18 3230-41
    • (1979) Appl. Opt. , vol.18 , Issue.19 , pp. 3230-3241
    • Cook, R.O.1    Hamm, C.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.