Micro NiTi-Si cantilever with three stable positions

Sensors and Actuators, A: Physical

Volumn 114, Issue 1, 2004, Pages 118-122

  Huang, W M ^a   Liu, Q Y ^a   He, L M ^a,b   Yeo, J H ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b Quantronix   (United States)

Author keywords

MEMS; Microcantilever; Shape memory alloy; Thin film

Indexed keywords

CANTILEVER BEAMS; ELECTRIC CURRENTS; LOW TEMPERATURE EFFECTS; POSITION CONTROL; SHAPE MEMORY EFFECT; SILICON; THIN FILMS;

MEMS; MICROCANTILEVER; MICROGRIPPERS; STABLE POSITIONS;

NICKEL COMPOUNDS;

EID: 3042800767     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.02.027     Document Type: Article

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