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Volumn 12, Issue 3, 2002, Pages 323-327

Residual stress-loaded titanium-nickel shape-memory alloy thin-film micro-actuators

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC RESISTANCE; HYSTERESIS; MICROACTUATORS; RESIDUAL STRESSES; SHAPE MEMORY EFFECT; THERMAL CONDUCTIVITY; THERMAL CYCLING; TITANIUM ALLOYS;

EID: 0036572999     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/3/319     Document Type: Article
Times cited : (34)

References (17)
  • 1
    • 0002089355 scopus 로고    scopus 로고
    • Microstructure and mechanical properties of sputter-deposited TiNi alloy thin film
    • (1999) ASME , vol.121 , pp. 105-107
    • Miyazaki, S.1    Ishida, A.2
  • 14
    • 0035505971 scopus 로고    scopus 로고
    • The effects of process-induced stress on the micro-structures and phase transformation characteristics of sputtered titanium-nickel thin-film shape-memory alloys
    • (2001) J. Micromech. Microeng. , vol.11 , pp. 686-691
    • Wang, R.X.1    Zohar, Y.2    Wong, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.