Pneumatically driven microcage for microbe manipulation in a biological liquid environment

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1499-1505

  Ok, Jerry ^a,b   Lu, Yen Wen ^a,c   Kim, Chang Jin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Business Technology Corporation   (United States)

^c RUTGERS UNIVERSITY   (United States)

Author keywords

Microelectromechanical systems (MEMS); Pneumatic actuation; Residual stress; Three dimensional (3 D) structure

Indexed keywords

ACTUATORS; CONTROL SYSTEM SYNTHESIS; MICROBIOLOGY; PNEUMATIC CONTROL EQUIPMENT; ROBOTICS; UNDERWATER EQUIPMENT; VISUALIZATION;

ELECTROPNEUMATIC CONTROL SYSTEM; MICROBE; MICROCAGE; PNEUMATIC ACTUATION; ROBOTIC MICROPOSITIONER;

MICROELECTROMECHANICAL DEVICES;

EID: 33845528103     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883887     Document Type: Article

References (14)

1. C.-J. Kim, A. P. Pisano, and R. S. Muller, "Silicon-processed over-hanging microgripper," J. Microelectromech. Syst., vol. 1, no. 1, pp. 31-36, Jan. 1992.
2. C. G. Keller, "Microfabricated high aspect ratio silicon flexures: MEMS precision instruments," Ph.D. dissertation, Univ. California, Berkeley, CA, 1998.
3. W.-H. Chu and M. Mehregany, "Microfabrication of tweezers with large gripping forces and a large range of motion," in Proc. IEEE Solid-State Sensor Actuator Workshop, 1994, pp. 107-110.
4. C. S. Pan and W. Hsu, "An electro-thermally and laterally driven polysilicon microactuator," J. Micromech. Microeng., vol. 7, pp. 7-13, 1997.
5. F. Arai and T. Fukuda, "A new pick up and release method by heating for micromanipulation," in Proc. IEEE Workshop Microelectromechanical Systems, 1997, pp. 383-388.
6. A. P. Lee, D. R. Ciarlo, P. A. Krulevitch, S. Lehew, J. Trevino, and M. A. Northrup, "A practical microgripper by fine alignment, eutectic bonding and SMA actuation," Sensors Actuators, A, pp. 755-759, 1996.
7. E. W. H. Jager, O. Inganas, and I. Lundstorm, "Microrobots for micrometer-size objects in aqueous media: Potential tools for single-cell manipulation," Science, vol. 288, pp. 2335-2338, 2000.
8. J. Zhou, H. Chan, T. To, K. Lai, and W. J. Li, "Polymer MEMS actuators for underwater micromanipulation," IEEE/ASME Trans. Mechatron., vol. 9, no. 2, pp. 334-342, Jun. 2004.
9. Y. Suzuki, "Flexible microgripper and its application to micro-measurement of mechanical and thermal properties," in Proc. IEEE Workshop Microelectromechanical Systems, 1996, pp. 406-411.
10. F. Arai, D. Andou, and T. Fukuda, "Adhesion forces reduction for micro manipulation based on micro physics," in Proc. IEEE Workshop Microelectromechanical Systems, 1996, pp. 354-359.
11. S. Butefisch, V. Seidemann, and S. Buttgenbach, "Novel micro-pneumatic actuator for MEMS," Sensors Actuators A, vol. 97-98, pp. 638-645, 2002.
12. I. Shimoyama, O. Kano, and H. Miura, "3D micro-structures folded by Lorentz force," in Proc. IEEE Workshop Microelectromechanical Systems, 1998, pp. 24-28.
13. G. Lin, C.-J. Kim, S. Konishi, and H. Fujita, "Design, fabrication and testing of a C-shape actuator," in Tech. Dig. IEEE Conf. Solid-State Sensors Actuators (Transducers), 1995, pp. 416-419.
14. R. D. Cook and W. C. Young, Advanced Mechanics of Materials. New York: MacMillan, 1985.