Mechanically driven microtweezers with integrated microelectrodes

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Choi, Y ^a   Ross, J ^b   Wester, B ^b   Allen, M G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPHYSIOLOGY; MICROELECTRODES; MICROMANIPULATORS; MICROSTRUCTURE; THICK FILMS;

CELLULAR STIMULATION; MICROTWEEZERS; THICK NICKEL BEAMS;

MEMS;

EID: 42549153300     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/065004     Document Type: Article

References (42)

1. Chiou C-H, Huang Y-Y, Chiang M-H, Lee H-H and Lee G-B 2006 New magnetic tweezers for investigation of the mechanical properties of single DNA molecules Nanotechnology 17 1217-24
2. Hosu B G, Jakab K, Banki P, Toth F and Forgacs G 2003 Magnetic tweezers for intracellular applications Rev. Sci. Instrum. 74 4158-63
3. de Vries A H B, Krenn B E, van Driel R and Kanger J S 2005 Micro magnetic tweezers for nanomanipulation inside living cells Biophys. J. 88 2137-44
4. Haber C and Wirtz D 2000 Magnetic tweezers for DNA micromanipulation Rev. Sci. Instrum. 71 4561-70
5. Fung C K M, Elhajj I, Li W J and Xi N 2002 A 2-D PVDF force sensing system for micro manipulation and micro assembly Proc. IEEE Int. Conf. Robot. Autom. pp 1489-94
6. Jericho S K, Jericho M H, Hubbard T and Kujath M 2004 Micro-electro-mechanical systems microtweezers for the manipulation of bacteria and small particles Rev. Sci. Instrum. 75 1280-2
7. Beyeler F, Neild A, Oberti S, Bell D J, Sun Y, Dual J and Nelson B J 2007 Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field J. Microelectromech. Syst. 16 7-15
8. Chronis N and Lee L P 2005 Electrothermally activated SU-8 microgripper for single cell manipulation in solution J. Microelectromech. Syst. 14 857-63
9. Zhang H, Bellouard Y, Clavel R and Sidler T 2002 Robotic micro-assembly of scaffold/cell constructs with a shape memory alloy gripper Proc. ICRA'02. IEEE Int. Conf. Robotics and Automation pp 1483-8
10. Dechev N, Cleghorn W L and Mills J K 2004 Microassembly of 3-D microstructures using a compliant, passive microgripper J. Microelectromech. Syst. 13 176-89
11. Anis Y H, Mills J K and Cleghorn W L 2006 Vision-based measurement of microassembly forces J. Micromech. Microeng. 16 1639-52
12. Cohn M B, Boehringer K F, Noworolski J M, Singh A, Keller C G, Goldberg K A and Howe R T 1998 Microassembly technologies for MEMS Proc. SPIE 3515 2-16
13. Keller C G and Howe R T 1997 Hexsil tweezers for teleoperated micro-assembly IEEE Tenth Ann. Int. Workshop on MEMS pp 72-7
14. Arai F, Andou D, Nonoda Y, Fukuda T, Iwata H and Itoigawa K 1998 Integrated microendeffector for micromanipulation IEEE/ASME Trans. Mechatron. 3 17-23
15. Kim C J, Pisano A P and Muller R S 1992 Silicon-processed overhanging microgripper J. Microelectromech. Syst. 1 31-6
16. Kim C J, Pisano A P, Muller R S and Lim M G 1992 Polysilicon microtweezers Sensors Actuators 33 221-7
17. Voland B E, Heerlein H and Rangelow I W 2002 Electrostatically driven microgripper Microelectron. Eng. 61 1015-23
18. Sun Y, Nelson B J, Potasek D P and Enikov E 2002 A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives J. Micromech. Microeng. 12 832-40
19. Dafflon M, Lorent B, Clavel R, Beyeler F and Nelson B 2006 Characterization of micro manipulation tasks operated with various controlled conditions by microtweezers 5th Int. Workshop on MicroFactories (IWMF)
20. Harouche I P and Shafai C 2005 Simulation of shaped comb drive as a stepped actuator for microtweezers application Sensors Actuators A 123 540-6
21. Molhave K, Hansen T M, Madsen D N and Boggild P 2004 Towards pick-and-place assembly of nanostructures J. Nanosci. Nanotech. 4 279-82
22. Sarajlic E, Yamahata C, Cordero M, Collard D and Fujita H 2008 HAREM: high aspect ratio etching and metallization MEMS 2008 IEEE 21st Int. Conf. on Micro Electro Mechanical System pp 315-8
23. Wierzbicki R, Houston K, Heerlein H, Bartha W, Debskia T, Eisinbergb A, Menciassib A, Carrozzab M C and Dariob P 2006 Design and fabrication of an electrostatically driven microgripper for blood vessel manipulation Microelectron. Eng. 83 1651-4
24. Greitmann G and Buser R A 1996 Tactile microgripper for automated handling of microparts Sensors Actuators A 53 410-5
25. Luo J K, Flewitt A J, Spearing S M, Fleck N A and Milne W I 2005 Comparison of microtweezers based on three lateral thermal actuator configurations J. Micromech. Microeng. 15 1294-302
26. Molhave K and Hansen O 2005 Electro-thermally actuated microgrippers with integrated force-feedback J. Micromech. Microeng. 15 1265-70
27. Fraser J, Hubbard T and Kujath M 2006 Theoretical and experimental analysis of an off-chip microgripper Can. J. Electr. Comput. Eng. 31 77-84
28. Bordatchev E V and Nikumb S K 2005 Electro-thermally driven microgrippers for micro-electro-mechanical systems applications J. Microlithogr., Microfabrication, Microsyst. 4 023011
29. Nguyen N, Ho S and Low C L 2004 A polymeric microgripper with integrated thermal actuators J. Micromech. Microeng. 14 969-74
30. Park J, Kim S, Kim D, Kim B, Kwon S, Park J and Lee K 2005 Identification and control of a sensorized microgripper for micromanipulation IEEE/ASME Trans. Mechatronics 10 601-6
31. Kim D H, Lee M G, Kim B and Sun Y 2005 A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study Smart Mater. Struct 14 1265-72
32. Nogimori W, Irisa K, Ando M and Naruse Y 1997 A laser-powered micro-gripper IEEE 10th Ann. Int. Workshop on MEMS pp 267-71
33. Park J and Moon W 2003 A hybrid-type micro-gripper with an integrated force sensor Microsyst. Technol. 9 511-9
34. Tanikawa T and Arai T 1999 Development of micro-manipulation system with two finger micro hand IEEE Trans. Robot. Autom. 15 152-62
35. Huang X, Cai J, Wang M and Lv X 2005 A piezoelectric bimorph micro-gripper with micro-force sensing IEEE Int. Conf. on Information Acquisition pp 145-9
36. Carrozza M C, Eisinberg A, Menciassi A, Campolo D, Micera S and Dario P 2000 Towards a force-controlled microgripper for assembling biomedical microdevices J. Micromech. Microeng. 10 271-6
37. Bang Y, Lee K, Kook J, Lee W and Kim I 2005 Micro parts assembly system with micro gripper and RCC unit IEEE Trans. Robot. 21 465-70
38. Kim D H, Kim B and Kang H 2004 Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation Microsyst. Technol. 10 275-80
39. Kohl M, Just E, Pfleging W and Miyazaki S 2000 SMA microgripper with integrated antagonism Sensors Actuators A 83 208-13
40. Gere J M 2000 Mechanics of Materials 5th edn (Pacific Grove, CA: Brooks/Cole Publishing)
41. Technic, Inc. http://www.technic.com/chm/nickelel.htm
42. Prado G R, Ross J D, DeWeerth S P and LaPlaca M C 2005 Mechanical trauma induces immediate changes in neuronal network activity J. Neural Eng. 2 148-58