Tetherless thermobiochemically actuated microgrippers

Proceedings of the National Academy of Sciences of the United States of America

Volumn 106, Issue 3, 2009, Pages 703-708

  Leong, Timothy G ^a   Randall, Christina L ^c   Benson, Bryan R ^a   Bassik, Noy ^a   Stern, George M ^a   Gracias, David H ^a,b,d  

^a Johns Hopkins University   (United States)

^b JOHNS HOPKINS UNIVERSITY   (United States)

^c JOHNS HOPKINS UNIVERSITY SCHOOL OF MEDICINE   (United States)

^d NONE   (United States)

Author keywords

Actuator; Biochemical; Robotics; Thin films

Indexed keywords

BIOLOGICAL FACTOR; CHEMICAL AGENT;

ANIMAL CELL; ANIMAL TISSUE; ARTICLE; BIOPSY; CAPILLARY; DEVICE; HISTOLOGY; IN VITRO STUDY; MICROGRIPPER; MOUSE; NONHUMAN; PRIORITY JOURNAL; TEMPERATURE; THERMODYNAMICS;

ANIMALS; BIOPSY; CATTLE; CELL SURVIVAL; CELLS, CULTURED; ELASTICITY; MICE; POLYMERS; ROBOTICS; TEMPERATURE; URINARY BLADDER;

EID: 58849122840     PISSN: 00278424     EISSN: 10916490     Source Type: Journal    
DOI: 10.1073/pnas.0807698106     Document Type: Article

References (34)

1. Angelo JA (2006) Robotics, A Reference Guide to a New Technology (Greenwood Press, Westport, CT).
2. Madden JD (2007) Mobile robots: Motor challenges and materials solutions. Science 318:1094-1097.
3. Cecil J, Powell D, Vasquez D (2007) Assembly and manipulation of micro devices - A state of the art survey. Robot Comput Integrated Manufacturing 23:580-588.
4. Kim CJ, Pisano AP, Muller RS, Lim MG (1992) Polysilicon microgripper. Sensors Actuators A Phys 33:221-227.
5. Pister KSJ, Judy MW, Burgett SR, Fearing RS (1992) Microfabricated hinges. Sensors Actuators A Phys 33:249-256.
6. Lee AP, et al. (1996) A practical microgripper by fine alignment, eutectic bonding and SMA actuation. Sensors Actuators A Phys 54:755-759.
7. Lu YW, Kim CJ (2006) Microhand for biological applications. Appl Phys Lett 89:1641011-1641013.
8. Luo JK, et al. (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors Actuators A Phys 132:346-353.
9. Jager EWH, Inganäs O, Lundström I (2000) Microrobots for micrometer-size objects in aqueous media: Potential tools for single-cell manipulation. Science 288:2335-2338.
10. Shahinpoor M, Bar-Cohen Y, Simpson JO, Smith J (1998) Ionic polymer-metal composites (IPMCs) as biomimetic sensors, actuators and artificial muscles - A review. Smart Mater Struct 7:R15-R30.
11. Buckley PR, et al. (2006) Inductively heated shape memory polymer for the magnetic actuation of medical devices. IEEE T Biomed Eng 53:2075-2083.
12. Small W, et al. (2007) Prototype fabrication and preliminary in vitro testing of a shape memory endovascular thrombectomy device. IEEE T Biomed Eng 54:1657-1666.
13. Flatt AE (2002) Our thumbs. Proc Baylor Univ Med Center 15:380-387.
14. Chapman RF (1982) The Insects: Structure and Function (Harvard Univ Press, Cambridge, MA).
15. Abermann R, Martinz HP (1984) Internal stress and structure of evaporated chromium and MgF2 films and their dependence on substrate temperature. Thin Solid Films 115:185-194.
16. Hoffman RW, Daniels RD, Crittenden EC, Jr (1954) The cause of stress in evaporated metal films. Proc Phys Soc London B 67:497-500.
17. Klokholm E, Berry BS (1968) Intrinsic stress in evaporated metal films. J Electrochem Soc 115:823-826.
18. Thornton JA, Hoffman DW (1989) Stress-related effects in thin films. Thin Solid Films 171:5-31.
19. Arora WJ, Nichol AJ, Smith HI, Barbastathis G (2006) Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges. Appl Phys Lett 88:0531081-0531083.
20. Chua CL, Fork DK, Van Schuylenbergh K, Lu JP (2003) Out-of-plane high-Q inductors on low-resistance silicon. J Microelectromech Soc 12:989-995.
21. Moiseeva E, Senousy YM, McNamara S, Harnett CK (2007) Single-mask microfabrication of three-dimensional objects from strained bimorphs. J Micromech Microeng 17:N63-N68.
22. Schmidt OG, Eberl K (2001) Thin solid films roll up into nanotubes. Nature 410:168.
23. Doerner MF, Nix WD (1988) Stresses and deformation processes in thin films on substrates. CRC CR Rev Sol State 14:225-268.
24. Leong TG, Benson BR, Call EK, Gracias DH (2008) Thin film stress-driven self-folding of microstructured containers. Small 4:1605-1609.
25. Morton SL, Degertekin FL, Khuri-Yakub BT (1999) Ultrasonic sensor for photoresist process monitoring. IEEE Transact Semiconductor Manufacturing 12:332-339.
26. Gogolides E, Tegou E, Beltsios K, Papadokostaki, Hatzakis M (1996) Thermal and mechanical analysis of photoresist and silylated photoresist films: Application to AZ 5214™. Microelectron Eng 30:267-270.
27. Paniez PJ, Chollet J-PE, Pons MJ (1993) Thermal properties of state of the art novolakdiazonaphtoquinone systems: Differences between bulk and film properties. Proc SPIE 1925:614-625.
28. Nikishkov GP (2003) Curvature estimation for multilayer hinged structures with initial strains. J Appl Phys 94:5333-5336.
29. Bassik NB, Stern GM, Gracias DH (2008) Patterning thin film mechanical properties to drive assembly of complex 3D structures. Adv Mater 20:4760-4764.
30. Qi ZQ, Meletis EI (2005) Mechanical and tribological behavior of nanocomposite multilayered Cr/a-C thin films. Thin Solid Films 479:174-181.
31. Freund LB, Suresh S (2003) Thin film materials: Stress, Defect Formation, and Surface Evolution (Cambridge Univ Press, Cambridge, UK).
32. Jamani KD, Harrington E, Wilson HJ (1989) Rigidity of elastomeric impression materials. J Oral Rehab 16:241-248.
33. Gimi B, et al. (2005) Self-assembled three dimensional radio frequency (RF) shielded containers for cell encapsulation. Biomed Microdev 7:341-345.
34. Ye HK, et al. (2007) Remote radio-frequency controlled nanoliter chemistry and chemical delivery on substrates. Angew Chem Int Ed 46:4991-4994.