Kinematics of mechanical and adhesional micromanipulation under a scanning electron microscope

Journal of Applied Physics

Volumn 92, Issue 9, 2002, Pages 5140-5149

  Saito, Shigeki ^a   Miyazaki, Hideki T ^b   Sato, Tomomasa ^c   Takahashi, Kunio ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EB IRRADIATION; KINEMATIC SYSTEMS; LOWER LIMITS; MICRO MANIPULATION; MODE DIAGRAMS; OPERATIONAL CONDITIONS; PICK AND PLACE; SCANNING ELECTRON MICROSCOPE; TIME DEPENDENCE;

FRACTURE; INTERFACES (MATERIALS); IRRADIATION; KINEMATICS; LOADING; MICROMANIPULATORS; NEEDLES; SCANNING ELECTRON MICROSCOPY; SPHERES;

FACTOR ANALYSIS;

EID: 18744402803     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1512313     Document Type: Article

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