Adhesion forces reduction for micro manipulation based on micro physics

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 354-359

  Arai, Fumihito ^a   Andou, Daisuke ^a   Fukuda, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ASSEMBLY; ELECTROSTATICS; END EFFECTORS; GRIPPERS; MAINTENANCE; MATERIALS HANDLING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING SILICON; SURFACE TENSION; VAN DER WAALS FORCES;

MANIPULABILITY; MICROMACHINES; MICROMANIPULATION; MICROPARTICLES; MICROPHYSICS;

SYSTEMS ENGINEERING;

EID: 0029754596     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)