Modeling of wet stiction in microelectromechanical systems (MEMS)

Journal of Microelectromechanical Systems

Volumn 16, Issue 5, 2007, Pages 1276-1285

  Hariri, Alireza ^a   Zu, Jean ^a   Mrad, Ridha Ben ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Failure analysis; Mechanical systems

Indexed keywords

ADHESION; CAPILLARITY; ELASTIC DEFORMATION; FAILURE ANALYSIS; HYDROPHILICITY; INTERFACES (MATERIALS); PLASTIC DEFORMATION; STICTION; SURFACE ROUGHNESS;

CAPILLARY FORCE; EQUILIBRIUM DISTANCE; WET STICTION;

MEMS;

EID: 34948890541     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.904349     Document Type: Article

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