Mechanical design and optimization of capacitive micromachined switch

Sensors and Actuators, A: Physical

Volumn 93, Issue 3, 2001, Pages 273-285

  Huang, J M ^a   Liew, K M ^a   Wong, C H ^a   Rajendran, S ^a   Tan, M J ^a   Liu, A Q ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Capacitive micromachined switch; Critical collapse voltage; Microwave and wireless communication; RF MEMS; Switching speed

Indexed keywords

CAPACITORS; DAMPING; DEFORMATION; FINITE ELEMENT METHOD; MICROMACHINING; RESIDUAL STRESSES; WAVEGUIDES;

CAPACITIVE MICROMACHINED SWITCHES; CRITICAL COLLAPSE VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0035888041     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00662-8     Document Type: Article

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