Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in

Nonlinear Analysis, Theory, Methods and Applications

Volumn 63, Issue 5-7, 2005, Pages

  Rochus, V ^a   Rixen, D J ^b   Golinval, J C ^a  

^a UNIVERSITY OF LIÈGE   (Belgium)

^b FACULTY OF INDUSTRIAL DESIGN ENGINEERING   (Netherlands)

Author keywords

Dynamics; Electromechanical coupling; Finite element; Micro systems; Pull in

Indexed keywords

COMPUTER SIMULATION; DYNAMICS; ELECTROSTATICS; FINITE ELEMENT METHOD; STABILITY;

ELECTROMECHANICAL COUPLING; MICRO-SYSTEMS; PULL-IN;

MICROELECTROMECHANICAL DEVICES;

EID: 28044435839     PISSN: 0362546X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.na.2005.01.055     Document Type: Conference Paper

References (5)

1. ANSYS Training Manual: Introduction to ANSYS 5.7 for MEMS, 2001.
2. P. Hammond Electromagnetism for Engineers 1986 Pergamon Oxford
3. T. Ikeda, Fundamentals of Piezoelectricity, Oxford, 1996.
4. Y.C. Liang, W.Z. Lin, H.P. Lee, S.P. Lim, K.H. Lee, and H. Sun Proper orthogonal decomposition and its applications - Part II model reduction for MEMS dynamical analysis J. Sound Vib. 256 3 2002 515 535
5. V. Rochus, D. Rixen, J.C. Golinval, Modeling of electro-mechanical coupling problem using the finite element formulation, Proceedings of SPIE's 10th Annual International Symposium on Smart Structures and Materials, 2002.