Electrostatic forces and their effects on capacitive mechanical sensors

Sensors and Actuators, A: Physical

Volumn 56, Issue 3, 1996, Pages 203-210

  Puers, Robert ^a   Lapadatu, Daniel ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Capacitive mechanical sensors; Electrostatic forces

Indexed keywords

CAPACITANCE; CRYSTALLINE MATERIALS; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; SILICON;

CAPACITIVE MECHANICAL SENSORS; ELECTROSTATIC FORCES;

SILICON SENSORS;

EID: 0030234258     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01310-6     Document Type: Article

References (11)

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